SM411F_Service Manual.pdf - 第5页
9 X Fra me X Fra me 10 Y Fr ame Y Fr ame Y-Motor Block Bearing Support Bearing Housing
7
INTERIOR
INTERIOR
Same Y1,Y2-
Frame Structure
Z-Driver Box
2Layers- 3rows
Flat Cable
Conveyor shuttle
position Hole was
builded
Y-Frame side
protruded
F/B(+15), Y-Frame(-25)
position moved
Y-Flat Cable height rised-
80mm
Modified Y1,Y2-
Plate
Rear side of Head
moved inward by 20mm
compared to SM321.
Front
8
X-Y Frame
X-Y Frame
Y2 Frame
X Frame
Y1 Frame
Carrier
Ass’y
Head
Assembly
9
X Frame
X Frame
10
Y Frame
Y Frame
Y-Motor Block
Bearing Support
Bearing Housing
11
X-Y SPEC.
X-Y SPEC.
X
Y
1.8 m/sec, 3G
1.8 m/sec, 3G
Max.
Accerlation
H/W Limit
S/W Limit
995 mm
989 mm
Y-Range
H/W Limit
S/W Limit
758 mm
752 mm
X-Range
Y: 3.0 μm/pulse
X: 3.2 μm/pulse
Resolution
± 0.01 mm
Repeat
accuracy
X 1:1 , Y 1:1
Reduction
rate
750 W
1000 W * 2
X: AC Servo + Ball Screw
Y: AC Servo + Ball Screw (Twin)
Mechanism
Remarkoptionsection
X
Y
1.8 m/sec, 3G
2.0 m/sec, 3G
Max.
Accerlation
H/W Limit
S/W Limit
768 mm
764 mm
Y-Range
H/W Limit
S/W Limit
743 mm
739 mm
X-Range
Y: 3.0 μm/pulse
X: 3.2 μm/pulse
Resolution
± 0.01 mm
Repeat
accuracy
X 1:1 , Y 1:1
Reduction
rate
750 W
1000 W * 2
X: AC Servo + Ball Screw
Y: AC Servo + Ball Screw (Twin)
Mechanism
Remarkoptionsection
• SM421 • SM411(F)
12
Head
Head
Air Moudle(not compatible)
Fiducial Camera
Handle(common in SM310)
Teaching
Beam(option)
CAMERA_COVER_BOARD_ASSY
FLY_CAM_ONE_KIT_ASSY_F16
(FLY_CAM_ONE_KIT_ASSY_MEGA-F16)
Grease nipple(X-axis)
HEAD I/O B’d
HEAD ILL. B’d
Mirror Motor
Light ASSY