SM411F_Service Manual.pdf - 第79页

the head assembly to the center of the fix-camera.. 5. The message “ Calibration is Prepared. T o Calibrate, Click [Next] ” appears in the message box. At this tim e, click the <Light…> button and adjust the bright…

3. “Then the message “Next Attach the Calibration Tool to Head 1. Click

[Next] for Moving Down Head. After Moving, Attach the Tool to head

Manually” appears. Click the <Next> button after inserting the CNT20

nozzle at nozzle holder of Head #1 manually.

Cautions to be taken when inserting the CNT20 nozzle.

Insert the CNT20 nozzle by referring to the following figure.

<Direction Setup Pin of CNT20 nozzle > <Direction Setup Groove of Nozzle

Holder >

4. The message “Move To Center Position of [Fix1] Camera. To Move, Click

[Next]” appears in the message window. Click the <Next> button to move

The CNT20 nozzle must be inserted in

the nozzle-holder so that the direction-

setup pin of the CNT20 nozzle is suitable

for the direction-setup groove of nozzle-

holder. Otherwise, an error may occur.

Caution

the head assembly to the center of the fix-camera..

5. The message “Calibration is Prepared. To Calibrate, Click [Next]” appears

in the message box. At this time, click the <Light…> button and adjust the

brightness of the light in the ‘Light Control’ dialog box so that the fiducial

mark on the CNT20 nozzle that is seen in the ‘SMvision’ window can be

seen clearly. Then click the <Next> button..

6. The calibration is performed automatically. If it is completed, the

calibration result is displayed as shown in the following figure. Click the

<Update> button to apply the new calibration value.

The range of the reference values for the ‘fly-camera calibration’ is as follows:

 Mega FOV 35

ScaleX:32.7~34.6 (μm/pixel)

ScaleY: 32.7~34.6 (μm/pixel)

R:-1~1(deg)

 Mega FOV 45

ScaleX:42.3~44.2 (μm/pixel)

ScaleY: 42.3~44.2 (μm/pixel)

R:-1~1(deg)

1.2.10.2. Fiducial Camera Offset Calibration

Measure the offset between the center of the fiducial camera and the first head

(Head 1, Head7) of each gantry.

This offset measurement must be completed to be able to use the Auto Nozzle

Change function for calibrations that follow. This process is performed only in the

Manual Mode.

In order to perform calibration of Fly-Camera Scale Calibration, first check if the

calibration tool is placed on the calibration tool position of the front ANC.

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