MIL- STD-883F 2004 TEST METHOD STANDARD MICROCIRCUITS.pdf - 第328页

MIL-STD-883F METHOD 2018.4 18 June 2004 16 FIGURE 2018-5. Viewing dir ecti on .

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MIL-STD-883F
METHOD 2018.4
18 June 2004
15
ROTATING STATIONARY (SPUTTERING) PLANETARY OR CONTINUOUS FEED WAFER-HOLDER SYSTEM
FIGURE 2018-4. Wafer sampling procedures (see table I)
- Continued.
*
MIL-STD-883F
METHOD 2018.4
18 June 2004
16
FIGURE 2018-5. Viewing direction
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MIL-STD-883F
METHOD 2018.4
18 June 2004
17
FIGURE 2018-6. (3,400X)
.
Voiding at passivation step (accept).