5OM-1011-002.pdf - 第135页
Section 6 Location of Sensors and Loads Tg0861-PM-MD Layout of Sensors and Loads in Dual-Beam X/Y (Y Axis) 0305-001-(M805YCB--0001) 6-4 B B A A SECT B-B SECT A-A YB Axis YA Axis Note Note Symbol Name -BPH021 Y A, YB-Axis…
Section 6 Location of Sensors and Loads
Tg0861-PM-MD
Layout of Sensors and Loads in Dual-Beam X/Y (X Axis)
0305-001-(M805YCB--0002) 6-3
Symbol Name
-BPH024 XA, XB-Axis Slide Origin
-BPH025
-BPH026
-MSVM01
XA, XB-Axis Limit (+)
XA, XB-Axis Limit (-)
XA, XB-Axis Motor
(XA: -Limit)
(XB: +Limit)
(XA: +Limit)
(XB: -Limit)
(XA: +Limit)
(XB: -Limit)
(XA: -Limit)
(XB: +Limit)
View from Machine B Side (Front) to X-Axis of Machine A Side (Rear)
Section 6 Location of Sensors and Loads
Tg0861-PM-MD
Layout of Sensors and Loads in Dual-Beam X/Y (Y Axis)
0305-001-(M805YCB--0001) 6-4
B
B
A
A
SECT B-BSECT A-A
YB Axis
YA Axis
Note
Note
Symbol Name
-BPH021 YA, YB-Axis Slide Origin
-BPH022
-BPH023
-BPH027
YA, YB-Axis Limit (+)
YA, YB-Axis Limit (-)
Beam Approach Detection
BPH029
BPH030
BPH031
BPH028
YSV01A
YSV01B
YSV02A
YSV02B
-YSV22
-MSVM02 YA, YB-Axis Motor
YA-Axis Stationary Position Stopper Backward Limit
YA-Axis Stationary Position Stopper Forward Limit
YB-Axis Stationary Position Stopper Forward Limit
YB-Axis Stationary Position Stopper Backward Limit
YA-Axis Stationary Position Stopper Forward Movement
YA-Axis Stationary Position Stopper Backward Movement
YB-Axis Stationary Position Stopper Forward Movement
YB-Axis Stationary Position Stopper Backward Movement
LA1, LB1-Axis Source Blow Pressure Open/Close
Note: Photosensor BPH027 moves together with the XB axis because it is attached to the XB Axis.
Section 6 Location of Sensors and Loads
Tg0861-PM-MD
Layout of Sensors and Loads in Nozzle Stocker
0307-002A(M805YF---0001) 6-5
SECT A-A
A
A
BB
SECT B-B
Symbol Name
-BPH061
-BPH062
-BPH063
-YSV12A Nozzle Stocker (A1, A2, B1) Open
-YSV12B Nozzle Stocker (A1, A2, B1) Closed
Lifted Nozzle Detection (A1, A2, B1,B2)
Nozzle Stocker (A1, A2, B1) Closing Check
Nozzle Stocker (A1, A2, B1) Opening Check