5OM-1011-002.pdf - 第150页
Section 7 Parts Location Tg0861-PM-MD Layout of SDS Mechanical Distribution Board 0305-001-(M805YBB--001 1) 7-3 Layout of Mechanical Distribution Board 2 (BB-0017) Layout of Mechanical Distribution Board 4 (BB-0019) Layo…
Section 7 Parts Location
Tg0861-PM-MD
Layout of Lower Frame
0305-001-(M805YBB--0002) 7-2
Layout of Driver A
(BD--0002)
Layout of Driver B
(BE--0002)
Layout of Driver A Panel
(BD--0001)
Layout of Driver B Panel
(BE--0001)
Vacuum pump
Layout 1, 2 of Control Box
(BC--0001, 0002)
Layout of Power Supply 3
(BH--0001)
Layout of Power Supply 2
(BG--0001)
Section 7 Parts Location
Tg0861-PM-MD
Layout of SDS Mechanical Distribution Board
0305-001-(M805YBB--0011) 7-3
Layout of Mechanical
Distribution Board 2
(BB-0017)
Layout of Mechanical
Distribution Board 4
(BB-0019)
Layout of Mechanical
Distribution Board 3
(BB-0018)
Layout of Feeder Base (A)
(QG--0001)
SDS Layout 1 of
Frame Middle Stage Section
(BB--0013)
SDS Layout 2 of
Frame Middle Stage Section
(BB--0015)
Layout of Feeder Base (B)
(QG--0002)
SDS Layout of
Operation Panel B
(BB--0007)
Layout 1 of
Control Box
(BC--0001)
Layout of
Power Supply 2
(Refer to BG--0001A)
SDS Layout of
Operation Panel A
(BB--0006A)
SDS Layout of
Operation Panel A
(BB--0005)
Beam B (Front)
Section 7 Parts Location
Tg0861-PM-MD
SDS 1 Layout of Operation Panel A
0305-001-(M805YBB--0005) 7-4