5OM-1011-002.pdf - 第136页
Section 6 Location of Sensors and Loads Tg0861-PM-MD Layout of Sensors and Loads in Nozzle Stocker 0307-002A(M805YF---0001) 6-5 SECT A-A A A BB SECT B-B Symbol Name -BPH061 -BPH062 -BPH063 -YSV12A Nozzle Stocker (A1, A2,…
Section 6 Location of Sensors and Loads
Tg0861-PM-MD
Layout of Sensors and Loads in Dual-Beam X/Y (Y Axis)
0305-001-(M805YCB--0001) 6-4
B
B
A
A
SECT B-BSECT A-A
YB Axis
YA Axis
Note
Note
Symbol Name
-BPH021 YA, YB-Axis Slide Origin
-BPH022
-BPH023
-BPH027
YA, YB-Axis Limit (+)
YA, YB-Axis Limit (-)
Beam Approach Detection
BPH029
BPH030
BPH031
BPH028
YSV01A
YSV01B
YSV02A
YSV02B
-YSV22
-MSVM02 YA, YB-Axis Motor
YA-Axis Stationary Position Stopper Backward Limit
YA-Axis Stationary Position Stopper Forward Limit
YB-Axis Stationary Position Stopper Forward Limit
YB-Axis Stationary Position Stopper Backward Limit
YA-Axis Stationary Position Stopper Forward Movement
YA-Axis Stationary Position Stopper Backward Movement
YB-Axis Stationary Position Stopper Forward Movement
YB-Axis Stationary Position Stopper Backward Movement
LA1, LB1-Axis Source Blow Pressure Open/Close
Note: Photosensor BPH027 moves together with the XB axis because it is attached to the XB Axis.
Section 6 Location of Sensors and Loads
Tg0861-PM-MD
Layout of Sensors and Loads in Nozzle Stocker
0307-002A(M805YF---0001) 6-5
SECT A-A
A
A
BB
SECT B-B
Symbol Name
-BPH061
-BPH062
-BPH063
-YSV12A Nozzle Stocker (A1, A2, B1) Open
-YSV12B Nozzle Stocker (A1, A2, B1) Closed
Lifted Nozzle Detection (A1, A2, B1,B2)
Nozzle Stocker (A1, A2, B1) Closing Check
Nozzle Stocker (A1, A2, B1) Opening Check
Section 6 Location of Sensors and Loads
Tg0861-PM-MD
Layout of Sensors and Loads in Irregular-Shaped Head L
0305-001-(M805YMB--0001) 6-6
Symbol Name
-BPH121 LA1, LB1-Axis Orgin
-BPH122
-BPH123
-BPH124
LA1, LB1-Axis Limit (+)
LA1, LB1-Axis Limit (-)
LA1, LB1-Axis Level Detection (1)
-BPH126
-BPH121A
-BPH125
-YSV21
-SVS121
-MSVM11
-MPM01
LA1, LB1-Axis Level Detection (3)
LA1, LB1-Axis Level Detection (2)
LA1, LB1-Axis Nozzle Excessive Pushing Detection
-BPX123
ZA1, ZB1-Axis Nozzle Rotational Origin
LA1, LB1-Axis Vacuum/Blow
LA1, LB1-Axis Vacuum Sensor
LA1, LB1-Axis Motor
LA1, LB1-Axis Nozzle Rotation Motor