5OM-1011-002.pdf - 第137页
Section 6 Location of Sensors and Loads Tg0861-PM-MD Layout of Sensors and Loads in Irregular-Shaped Head L 0305-001-(M805YMB--0001) 6-6 Symbol Name -BPH121 LA1, LB1-Axis Orgin -BPH122 -BPH123 -BPH124 LA1, LB1-Axis Limit…
Section 6 Location of Sensors and Loads
Tg0861-PM-MD
Layout of Sensors and Loads in Nozzle Stocker
0307-002A(M805YF---0001) 6-5
SECT A-A
A
A
BB
SECT B-B
Symbol Name
-BPH061
-BPH062
-BPH063
-YSV12A Nozzle Stocker (A1, A2, B1) Open
-YSV12B Nozzle Stocker (A1, A2, B1) Closed
Lifted Nozzle Detection (A1, A2, B1,B2)
Nozzle Stocker (A1, A2, B1) Closing Check
Nozzle Stocker (A1, A2, B1) Opening Check
Section 6 Location of Sensors and Loads
Tg0861-PM-MD
Layout of Sensors and Loads in Irregular-Shaped Head L
0305-001-(M805YMB--0001) 6-6
Symbol Name
-BPH121 LA1, LB1-Axis Orgin
-BPH122
-BPH123
-BPH124
LA1, LB1-Axis Limit (+)
LA1, LB1-Axis Limit (-)
LA1, LB1-Axis Level Detection (1)
-BPH126
-BPH121A
-BPH125
-YSV21
-SVS121
-MSVM11
-MPM01
LA1, LB1-Axis Level Detection (3)
LA1, LB1-Axis Level Detection (2)
LA1, LB1-Axis Nozzle Excessive Pushing Detection
-BPX123
ZA1, ZB1-Axis Nozzle Rotational Origin
LA1, LB1-Axis Vacuum/Blow
LA1, LB1-Axis Vacuum Sensor
LA1, LB1-Axis Motor
LA1, LB1-Axis Nozzle Rotation Motor
Section 6 Location of Sensors and Loads
Tg0861-PM-MD
Layout of Sensors and Loads in Irregular-Shaped Head R
0305-001-(M805YMC--0001) 6-7
Symbol Name
-BPH121 LA2, LB2-Axis Orgin
-BPH122
-BPH123
-BPH124
LA2, LB2-Axis Limit (+)
LA2, LB2-Axis Limit (-)
LA2, LB2-Axis Level Detection (1)
-BPH126
-BPH121A
-BPH125
-YSV21
-SVS121
-MSVM11
-MPM01
LA2, LB2-Axis Level Detection (3)
LA2, LB2-Axis Level Detection (2)
LA2, LB2-Axis Nozzle Excessive Pushing Detection
-BPX123
ZA2, ZB2-Axis Nozzle Rotational Origin
LA2, LB2-Axis Vacuum/Blow
LA2, LB2-Axis Vacuum Sensor
LA2, LB2-Axis Motor
ZA2, ZB2-Axis Nozzle Rotation Motor