5OM-1011-002.pdf - 第59页
Section5 Electrical Circuit Diagram Interlock Board IN 1-3 0305-001- (M805WBB--0006) 5-16 Tg0861-PM-MD Beam Emergency Stop 2 (P AUSE) XA-Axis Positioning Completed Y A-Axis Positioning Completed XB-Axis Positioning Compl…
Section5 Electrical Circuit Diagram
Interlock Board IN 1-2
0305-001- (M805WBB--0005) 5-15 Tg0861-PM-MD
Air Pressure Drop
Detection
LA1-Axis Level
Detection (1)
LA1-Axis Level
Detection (2)
LA1-Axis Level
Detection (3)
LA1-Axis Level
Detection (4)
LA2-Axis Level
Detection (1)
LA2-Axis Level
Detection (2)
LA2-Axis Level
Detection (3)
LA2-Axis Level
Detection (4)
LB2-Axis Level
Detection (1)
LB2-Axis Level
Detection (2)
LB2-Axis Level
Detection (3)
LB2-Axis Level
Detection (4)
LB1-Axis Level
Detection (1)
LB1-Axis Level
Detection (2)
LB1-Axis Level
Detection (3)
LB1-Axis Level
Detection (4)
Beam Approach
Detection
Lifted Nozzle Detection
A1
Lifted Nozzle Detection
A2 (Option)
Lifted Nozzle Detection
B1
Lifted Nozzle Detection
B2 (Option)
YA-Axis Startionary
Position Stopper
Backward Limit
YB-Axis Startionary
Position Stopper
Backward Limit
Beam A Power Supply
Shut-Off Detection
Beam B Power Supply
Shut-Off Detection
Maintenance Cover A
Detection
Maintenance Cover B
Detection
Maintenance Opening
Section Detection A
Maintenance Opening
Section Detection B
BPC-Axis Alarm
2A1-Axis Alarm (Reserved)
Note:
The area surrounded by the dashed line belongs to the relay P.C.B. (UA18 & UA19).
MB (A)
Block
MC (A)
Block
MC (B)
Block
MB (B)
Block
C (A)
Block
F(A1)
Block
F (B1)
Block
Connecter Board
Section5 Electrical Circuit Diagram
Interlock Board IN 1-3
0305-001- (M805WBB--0006) 5-16 Tg0861-PM-MD
Beam Emergency Stop 2
(PAUSE)
XA-Axis Positioning
Completed
YA-Axis Positioning
Completed
XB-Axis Positioning
Completed
YB-Axis Positioning
Completed
Note:
The area surrounded by the dashed line belongs to the relay P.C.B. (UA18 & UA19).
Connector Board
Connector Board
Connector Board
ZA2-Alarm (Reserved)
Lifted feeder Detection
(Short)
Lifted feeder Detection
A2
Lifted feeder Detection
(Short)
Lifted feeder Detection
B2
P.C.B. Clamp Detection
(Option)
P.C.B. Clamp Detection
Fixed Side (Option)
YA-Axis Slide Origin
YB-Axis Slide Origin
Beam Emergency Stop 3
(EMER)
LA1-Axis Drawing
Interlock
LA2-Axis Drawing
Interlock
LB1-Axis Drawing
Interlock
LB2-Axis Drawing
Interlock
ZB2-Alarm (Reserved)
ZB1-Alarm (Reserved)
Section5 Electrical Circuit Diagram
Interlock Board OUT
0305-001- (M805WBB--0007) 5-17 Tg0861-PM-MD
BPC-Axis Pulse Cut
BPC-Axis Driving Power
Supply Shut-Off
Load Power Supply
Shut-Off
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
Note:
The area surrounded by the dashed line belongs to the relay P.C.B. (UA18 & UA19).
Connector Board
Connector Board
XA/YA-Axis Pulse Cut
LA1-Axis Pulse Cut
LA2-Axis Pulse Cut
LB2-Axis Pulse Cut
LB1-Axis Pulse Cut
XB/YB-Axis Pulse Cut
XA/YA-Axis Driving Power
Supply Shut-Off
LA1-Axis Driving Power
Supply Shut-Off
LA2-Axis Driving Power
Supply Shut-Off
LB2-Axis Driving Power
Supply Shut-Off
LB1-Axis Driving Power
Supply Shut-Off
XB/YB-Axis Driving Power
Supply Shut-Off
ZA1-Axis Driving Power
Supply Shut-off (Reserved)
ZA2-Axis Driving Power
Supply Shut-off (Reserved)
ZB1-Axis Driving Power
Supply Shut-off (Reserved)
ZB2-Axis Driving Power
Supply Shut-off (Reserved)