4OM-1733-005w_F8.pdf - 第105页

4OM-1733 1-4-32 4.7.7 V acuum Filter Change Cycle : Every 3 Months (Required Time : 30 minutes) Filter Holder Fig. 4A4-43 Procedure (1) Pull out the lter holder in the upper direction using the lter attachment/ removal…

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4OM-1733
1-4-31
4.7.6 Nozzle Change Cam Surface (Upper) Cleaning and Oiling
Cycle : Every 3 Months (Required Time : 5 minutes)
Grease : DAPHNE EPONEX GREASE No.1
Nozzle Change Cam Face
Fig. 4A4-41
Procedure
(1) If a foreign substance adheres to the cam face, remove it with a pair of
tweezers.
(2) Apply grease (0.01 cc) to the upper side of the cam face with a syringe.
Note
(a) "0.01 cc" is almost equivalent to the size of "1005 Chip".
(b) Use No. 19 (brown) nozzle.
No.19
Fig. 4A4-42
1208-001
4.7 Head Section
4OM-1733
1-4-32
4.7.7 Vacuum Filter Change
Cycle : Every 3 Months (Required Time : 30 minutes)
Filter Holder
Fig. 4A4-43
Procedure
(1) Pull out the lter holder in the upper direction using the lter attachment/
removal jig.
(2) Replace the two vacuum lters with new ones.
Filter Holder
Filter
Fig. 4A4-44
NOTICE
Makesureofthelterfolderinsertiondirection,and
then insert the folder securely to the end.
Makesurethatthelterfolderuppersurfaceis
aligned with the top block upper surface.
1208-001
4.7 Head Section
4OM-1733
1-4-331403-005
4.7 Head Section
4.7.8 Head U/D Ball Screw (HL Axis) Cleaning and Oiling
Cycle : Every 3 Months (Required Time : 5 minutes)
Grease : DAPHNE EPONEX GREASE No.1
Head U/D Ball Screw (HL Axis)
Fig. 4A4-44-1
Procedure
(1) Wipe old grease out using a rag.
(2) Apply grease in the ball screw groove slightly using the syringe.
Note
Use No. 19 (brown) nozzle.
No.19
Fig. 4A4-44-2
(3) After lubrication, move the HL-axis up and down 25 mm ve times using the
manual axis operation to smooth the grease.