4OM-1733-005w_F8.pdf - 第106页
4OM-1733 1-4-33 1403-005 4.7 Head Section 4.7.8 Head U/D Ball Screw (HL Axis) Cleaning and Oiling Cycle : Every 3 Months (Required Time : 5 minutes) Grease : DAPHNE EPONEX GREASE No.1 Head U/D Ball Screw (HL Axis) Fig. 4…
4OM-1733
1-4-32
4.7.7 Vacuum Filter Change
Cycle : Every 3 Months (Required Time : 30 minutes)
Filter Holder
Fig. 4A4-43
Procedure
(1) Pull out the lter holder in the upper direction using the lter attachment/
removal jig.
(2) Replace the two vacuum lters with new ones.
Filter Holder
Filter
Fig. 4A4-44
NOTICE
Makesureofthelterfolderinsertiondirection,and
then insert the folder securely to the end.
Makesurethatthelterfolderuppersurfaceis
aligned with the top block upper surface.
1208-001
4.7 Head Section
4OM-1733
1-4-331403-005
4.7 Head Section
4.7.8 Head U/D Ball Screw (HL Axis) Cleaning and Oiling
Cycle : Every 3 Months (Required Time : 5 minutes)
Grease : DAPHNE EPONEX GREASE No.1
Head U/D Ball Screw (HL Axis)
Fig. 4A4-44-1
Procedure
(1) Wipe old grease out using a rag.
(2) Apply grease in the ball screw groove slightly using the syringe.
Note
Use No. 19 (brown) nozzle.
No.19
Fig. 4A4-44-2
(3) After lubrication, move the HL-axis up and down 25 mm ve times using the
manual axis operation to smooth the grease.
4OM-1733
1-4-341403-005
4.7 Head Section
4.7.9 Head U/D Linear Guide (HL Axis) Cleaning and Oiling
Cycle : Every 3 Months (Required Time : 5 minutes)
Grease : DAPHNE EPONEX GREASE No.1
Head U/D Linear Guide (HL Axis)
Fig. 4A4-44-3
Procedure
(1) Wipe old grease out using a rag.
(2) Apply grease in the linear guide groove slightly using the syringe.
Notice
Apply grease, taking care that the grease does not stick to the
sensor.
Note
(a) Use No. 19 (brown) nozzle.
(b) Grease should be applied every 3 months after the initial month.
No.19
Fig. 4A4-44-4
(3) After lubrication, move the HL-axis up and down 25 mm ve times using the
manual axis operation to smooth the grease.