4OM-1733-005w_F8.pdf - 第145页

4OM-1733 1-5-12 121 1-001

4OM-1733

1-5-11

1211-001

5.6 Nozzle Filter Insertion Procedure

(5) Push the lever down to remove the nozzle.

Nozzle

Lever

Rising

Fig. 4A5-13

(6) Make sure that the nozzle lter has been inserted.

Nozzle

Nozzle Filter

Fig. 4A5-14

4OM-1733

1-5-12

1211-001

4OM-1733

1-6-1

1208-001

6. Use Procedure of Diffusion Plate Setup Jig

Procedure

(1) Set the both inner and outer diffusion plates temporarily.

Outer Diffusion Plate

Inner Diffusion Plate

Fig. 4A6-1

(2) Attach the Jigs No. 1 and No. 2 onto the three locations as shown in the

gure.

Take care not to damage the linear measure sensor.

Jig 1 Jig 2

Fig. 4A6-2