ServiceInstruction_Vision XP.pdf - 第28页

Page 24 Vision XP+ V AC 2 M aintenance 2.5 Pro cess chamber Operating Instructions V ersion 1.5 2.5.8 Replacing the Seals Fig. 2-2 1 Rep lacing the P rocess C hamber Seals Fig. 2-2 2 Replacin g the Pr ocess Cha mber Seal…

Vision XP+ VAC Page 23

2 Maintenance

2.5 Process chamber

Operating Instructions

Version 1.5

2.5.7 Cleaning the Seal

Fig. 2-20 Cleaning the Process Chamber

Seal

The seals must be clean and un-

damaged in order to assure reliable

production.

Consumable materials:

• Appropriate cleaning agent

• Rags

Procedure:

1. Raise the process chamber.

2. Clean the process chamber

seals with Appropriate cleaning

agent and a rag.

3. Clean all contamination from

the sheet metal panel at the

mating side of the seal.

4. The seals at the system’s inlet

and outlet must be cleaned us-

ing the same procedure.

Seals

Page 24 Vision XP+ VAC

2 Maintenance

2.5 Process chamber

Operating Instructions

Version 1.5

2.5.8 Replacing the Seals

Fig. 2-21 Replacing the Process Chamber

Seals

Fig. 2-22 Replacing the Process Chamber

Seals

Fig. 2-23 Replacing the Process Chamber

Seals

Consumable materials:

detergent water

Procedure:

1. The seal can be pulled by hand

from the metal bracket.

2. Then clean the metal bracket

inside with detergent water.

3. Loosen the screws slightly

4. Now, the seal can be pressed

again into the metal bracket.

5. Press down the holder sheet

with the hand and tighten the

screws again.

Vision XP+ VAC Page 25

2 Maintenance

2.6 EC – Check gas blower

Operating Instructions

Version 1.5

2.6 EC – Check gas blower

Note!

It is first necessary to dismantle the ball value and the cooler of the vacuum

pump to obtain access to the gas blower.

Fig. 2-24 Check gas blower

Fig. 2-25 Check gas blower

Fig. 2-26 Check gas blower

Checking the EC-gas blower:

The full cooling zone at the rear of

the plant can be hinged down.

A torch may then be used to inspect

the suction area of the cooling mod-

ule.

This will show whether the blower

fins are so dirty that the blower will

need to be dismantled for cleaning.