S1.pdf - 第20页
0% 10% 20% 30% 40% 50% 60% 70% 80% 90% 100% 0% 10% 20% 30% 40% 50% 60% 70% 80% 90% 100% 201814 201816 201818 201820 201822 201824 201826 201828 201830 201832 201834 201836 201838 201840 201842 201844 201846 201848 201850…
Performance of NXE:3400B in the Field
Slide 19
Public
0%
10%
20%
30%
40%
50%
60%
70%
80%
90%
100%
0%
10%
20%
30%
40%
50%
60%
70%
80%
90%
100%
201814
201816
201818
201820
201822
201824
201826
201828
201830
201832
201834
201836
201838
201840
201842
201844
201846
201848
201850
201852
201902
201904
201906
201908
201910
201912
201914
201916
201918
201920
201922
201924
201926
201928
201930
201932
201934
201936
NXE:3400B’s availability substantially improved in 2018
Growing installed base needs further improvements for high volume
Availability 13wma (%)
High volume manufacturing target
Data from growing installed base without configuration repair / upgrades
Weeks (2018/2019)
Maintenance
USD
Average (13wma)
6 systems
29 systems
Upgrades
Slide 20
Public
250W EUV power, Source availability >85%
Customers have started HVM
Slide 21
• (left) 250W EUV power meeting dose stability requirements
• (right) >85% Source Availability over 13 weeks at customers,
without configuration repair / upgrades
Public