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250W EUV power , Source availabi lity >85% Customers have started HVM Slide 21 • (left) 250W EUV pow er meeting dose stability requirements • (right) >85% Source A vailab ility over 13 w eeks at custom ers, w ithou…
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201842
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NXE:3400B’s availability substantially improved in 2018
Growing installed base needs further improvements for high volume
Availability 13wma (%)
High volume manufacturing target
Data from growing installed base without configuration repair / upgrades
Weeks (2018/2019)
Maintenance
USD
Average (13wma)
6 systems
29 systems
Upgrades
Slide 20
Public
250W EUV power, Source availability >85%
Customers have started HVM
Slide 21
• (left) 250W EUV power meeting dose stability requirements
• (right) >85% Source Availability over 13 weeks at customers,
without configuration repair / upgrades
Public
Slide 22
EUV Source operation at 250W
with 99.90% fields meeting dose spec
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100.0
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50
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250
May 2018 June 2018 July 2018 August 2018
Source
power
(W)
Die
yield
(%)
Public