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EUV Source improvements Slide 58 Public

Slide 57

Tin ion distributions

Data are used for optimization of H

flow in the source

Public

EUV Source improvements

Slide 58

Public

EUV Source: Changes to Vessel in 2019

Introduction of modularity enables faster service and lower downtime

Current vessel

Modular vessel (EUV source for 3400C)

1: Collector swap door

2: Vessel service door

3: Metrology directly on vessel, fast EUV recovery

4. Continuous tin supply droplet generator

5. Eliminate manual laser beam adjustment

Droplet Generator

Droplet Catcher

EUV Collector

Intermediate Focus

Slide 59

Public