S1.pdf - 第39页
Slide 39 EUV System overview Scanner V essel F inal F ocus A ssembly B eam T ransport S ystem Driv e Laser A ncillaries Driv e Laser Common Housing [ P ower A mplifiers] Public
• Key factors for high source power are:
High input CO
2
laser power
High conversion efficiency (CO
2
to EUV energy)
High collection efficiency (reflectivity and lifetime)
Advanced controls to minimize dose overhead
Vessel
With Collector, Droplet
Generator and Metrology
Focusing
Optics
Electronics
Electronics
Controllers for Dose
and Pre-pulse
*
EUV power
(source/scanner interface, [W])
CO
2
power [W]
Conversion
Efficiency
1 – Dose
Overhead
*
Pre-Pulse
Isolator
Pre
Amp
PA
Seed
optics
optics
PA
optics
optics
PA
optics
Power Amplifier
Beam Transport System
Fab Floor
Sub-Fab Floor
Master Oscillator
PA
optics
Pre-pulse
seed laser
trigger control
Slide 38
LPP: Master Oscillator Power Amplifier (MOPA)
Pre-Pulse Source Architecture
Public
Intermediate
Focus, (IF)
Slide 39
EUV System overview
Scanner
Vessel
Final
Focus
Assembly
Beam
Transport
System
Drive Laser
Ancillaries
Drive Laser
Common Housing
[Power Amplifiers]
Public
Slide 40
Industrial high power CO
2
laser
High beam quality for gain extraction and EUV generation
▪ 4 cascaded power amplifiers (PAs) in HPAC
▪ Individually optimized geometry and settings
▪ Connected by relay optics
▪ Extensive metrology between amplifiers & at DL exit
PA0 PA1 PA2 PA3
HPSM
On-droplet
High Power Amplifiers
BTS
Public