S1.pdf - 第65页
Slide 65 500W in-burst EUV power demonstration Demon strated on the developmen t system at 80 kHz 0 1 2 3 4 5 6 7 8 9 10 0 2000 4000 6000 8000 10000 12000 14000 16000 Number of pulses EUV pulse energy, mJ 500 W 450 W EUV…
>250W is now demonstrated,
Shipping started in the end of 2017
Progress for in EUV power: 250W
EUV power
(source/scanner interface, [W])
CO
2
power [W]
Conversion
Efficiency
*
1 – Dose
Overhead
*
Increase average and peak laser power
Enhanced isolation technology
Advanced target formation technology
Improved dose-control technique
Slide 64
Public
Operation Parameters
Repetition Rate
50kHz
MP power on droplet
21.5kW
Conversion Efficiency
6.0%
Collector Reflectivity
41%
Dose Margin
10%
EUV Power
250 W
Slide 65
500W in-burst EUV power demonstration
Demonstrated on the development system at 80 kHz
0 1 2 3 4 5 6 7 8 9 10
0
2000
4000
6000
8000
10000
12000
14000
16000
Number of pulses
EUV pulse energy, mJ
500 W
450 W
EUV source power and key technology steps
Open loop, 15 ms Bursts, 80 kHz,
3% duty cycle
On the development system
EUV pulse energy histograms
Historical trend: ~ two years from
demonstration in research to a product
Public
Slide 66
Increase of CO
2
laser power
High beam quality for gain extraction and EUV generation
Public
Source: Beam Quality of Higher Power Lasers- EUVL 2018 Trumpf
Key technologies:
1. Pulsed drive laser with high
average power capability
2. Gain distribution inside
amplification chain
3. Isolation between amplifiers
4. Metrology, control, and
automation