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Slide 46 Forces on Droplets during EUV Generation High EUV power at high repetition rates drives requirements for hi gher speed droplets with large spac e between droplets Public Droplet deformations induced by LPP of pr…
Slide 45
Droplet Generator: Principle of Operation
Multiple small droplets coalesce together to form larger droplets at larger separation distance
Large separation between the droplets by special modulation
Public
Slide 46
Forces on Droplets during EUV Generation
High EUV power at high repetition rates drives requirements
for higher speed droplets with large space between droplets
Public
Droplet deformations induced
by LPP of previous pulses
Lowest vibrational
mode n=2
Slide 47
Droplet Generator: Principle of Operation
Large separation between the droplets by special modulation
Tin droplets at 80 kHz and at different applied pressures.
Images taken at a distance of 200 mm from the nozzle
1.5 mm
Increasing
Droplet Generator
Pressure
Public