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Slide 9 Throughput [ wafers per hour] 2014 Q1 2014 Q2 2014 Q3 2014 Q4 2015 Q3 2015 Q4 2016 Q2 2016 Q4 2017 Q1 NXE:335 0B at custom ers 2017 Q3 2017 Q3 2018 Q1 NXE productivity reached 170 wafers per hour On NXE:3400C in …

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Slide 8
EUV is being ramped up quickly now
Since Jan 2018, EUV systems have run more
wafers (2.5M) than 2011-2017 combined
2013
EUV yearly shipped and cumulative capacity [10
3
wafers/day]
NXE:3400B installed base stands at 38 (per
Q2 2019), cumulative EUV wafer capacity
will approach 10
8
wafers per year by 2020
2020
2019
2018
2017
0
5
10
15
20
30
35
40
27
10
#systems
in fabs
Capacity (wpd)
Cumulative
capacity (wpd)
0
5
10
15
20
25
30
35
40
Worldwide installed base (3400B)
4.5M
2019
2018
2017
2016
2015
2014
2M
1.1M
0.6M
Cumulative wafer count
38
(per Q219)
25
Installed base NXE:3400B
Cumulative EUV wafer count
Public
Slide 9
Throughput [
wafers
per hour]
2014
Q1
2014
Q2
2014
Q3
2014
Q4
2015
Q3
2015
Q4
2016
Q2
2016
Q4
2017
Q1
NXE:3350B
at customers
2017
Q3
2017
Q3
2018
Q1
NXE productivity reached 170 wafers per hour
On NXE:3400C in ASML factory
ATP test: 26x33mm
2
, 96 fields, 20mJ/cm
2
NXE:3400B
at customers
NXE:3350B
ASML factory
170
160
150
180
140
110
100
90
80
70
60
50
40
30
20
10
0
130
120
NXE:3300B
at customers
NXE:3300B
NXE:3350B
NXE:3400B
NXE:3400B
ASML factory
NXE:3400B
ASML factory (proto)
NXE:3400B
at customers
NXE:3400C
2019
Q1
2019
Q2
NXE:3400C
ASML factory
Public
NXE:3400B: 13 nm resolution at full productivity
Supporting 5 nm logic, <15nm DRAM requirements
Slide 10
New Flex-illuminator
outer sigma to 1.0
Inner sigma to 0.06
reduced PFR* (0.20)
Overlay set up
Set-up and modelling
improvements
Reticle Stage
Improved clamp flatness
for focus and overlay
Projection Optics
Continuously Improved
aberration performance
Wafer Stage
Flatter clamps, improved
dynamics and stability
125WPH
Reduced overhead
Improved source power
*PFR = pupil fill ratio
Overlay
Imaging/Focus
Productivity
Resolution 13 nm
Full wafer CDU
< 1.1 nm
DCO < 1.4 nm
MMO < 2.0 nm
Focus control
< 60 nm
Productivity
≥ 125 WPH
Public