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Slide 57 T in ion distributions Dat a ar e used for opti miz ation of H 2 flow in the source Public

Slide 56

Measurement of fast tin ion and radiation distributions

Multiple sensors on a rotating frame

Sensors

• Faraday Cups: ion energy and charge distributions

• CO

PEMs: scattered infrared radiation

• EUV PDs: EUV emission and anisotropy

Applications

• Input to Plasma-Gas Interaction /

Computational Fluid Dynamics model

• Evaluation of collector protection capability

• Improvement of Conversion Efficiency

Public

Slide 57

Tin ion distributions

Data are used for optimization of H

flow in the source

Public

EUV Source improvements

Slide 58

Public