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NXE:3XY0 EUV Source: Main modules Populated vacuum vessel with tin droplet generator and collector Slide 41 Droplet Generator Droplet Catcher EUV Coll ector Intermediate Focus Public
Slide 40
Industrial high power CO
2
laser
High beam quality for gain extraction and EUV generation
▪ 4 cascaded power amplifiers (PAs) in HPAC
▪ Individually optimized geometry and settings
▪ Connected by relay optics
▪ Extensive metrology between amplifiers & at DL exit
PA0 PA1 PA2 PA3
HPSM
On-droplet
High Power Amplifiers
BTS
Public
NXE:3XY0 EUV Source: Main modules
Populated vacuum vessel with tin droplet generator and collector
Slide 41
Droplet Generator
Droplet Catcher
EUV Collector
Intermediate Focus
Public
Slide 42
EUV Source: MOPA + Pre-Pulse Operation
Public
Beam Diameter 100mm
Droplet Diameter 27mm
CO
2
beam
Pre-pulse
CO
2
beam
Main pulse
Beam Diameter 400mm
Target Diameter 400mm
Droplet stream of 27mm droplets
80 m/s
Target
Expansion
EUV
CO
2
beam
Pre-pulse
CO
2
beam
Main-pulse
Target
Expansion
Spatial View
PP
MP
10.59 µm
Temporal View
Time
Z
X