S1.pdf - 第42页

Slide 42 EUV Source: MOP A + Pre-Pulse Operation Public Beam Diameter 100 m m Droplet Diameter 27 m m CO 2 beam Pre-pulse CO 2 beam Main pulse Beam Diameter 400 m m T arget Diamet er 400 m m Droplet stream of 27 m m drop…

100%1 / 70
NXE:3XY0 EUV Source: Main modules
Populated vacuum vessel with tin droplet generator and collector
Slide 41
Droplet Generator
Droplet Catcher
EUV Collector
Intermediate Focus
Public
Slide 42
EUV Source: MOPA + Pre-Pulse Operation
Public
Beam Diameter 100mm
Droplet Diameter 27mm
CO
2
beam
Pre-pulse
CO
2
beam
Main pulse
Beam Diameter 400mm
Target Diameter 400mm
Droplet stream of 27mm droplets
80 m/s
Target
Expansion
EUV
CO
2
beam
Pre-pulse
CO
2
beam
Main-pulse
Target
Expansion
Spatial View
PP
MP
10.59 µm
Temporal View
Time
Z
X
Droplet generation
Slide 43
Public