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EUV Source: Changes to V essel in 2019 Introduction of mod ularity enables faster service and lower downtime Current vessel Modular vessel (EUV source for 34 00C) 1: Collector sw ap door 2: V essel service door 3: Metrol…
EUV Source improvements
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EUV Source: Changes to Vessel in 2019
Introduction of modularity enables faster service and lower downtime
Current vessel
Modular vessel (EUV source for 3400C)
1: Collector swap door
2: Vessel service door
3: Metrology directly on vessel, fast EUV recovery
4. Continuous tin supply droplet generator
5. Eliminate manual laser beam adjustment
1
3
2
4
5
Droplet Generator
Droplet Catcher
EUV Collector
Intermediate Focus
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0
10
20
30
40
50
60
Collector Mirror Droplet generator replacement Droplet generator refill
Mean Time to Repair (
hrs)
Current Vessel NXE:3400C
MTTR includes total time for diagnostics, access, part replacement and system recovery (green to green)
4x
3x
NXE:3400C improves serviceability and reduces maintenance time
with new vessel
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