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Slide 60 Public 0 10 20 30 40 50 60 Collector Mirro r Droplet generat or replacement Droplet generator re fill Mean T ime to Repair ( hrs) Current Vesse l NXE:340 0C MTTR includes total time for diagnostics, access, pa r…
EUV Source: Changes to Vessel in 2019
Introduction of modularity enables faster service and lower downtime
Current vessel
Modular vessel (EUV source for 3400C)
1: Collector swap door
2: Vessel service door
3: Metrology directly on vessel, fast EUV recovery
4. Continuous tin supply droplet generator
5. Eliminate manual laser beam adjustment
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Droplet Generator
Droplet Catcher
EUV Collector
Intermediate Focus
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Collector Mirror Droplet generator replacement Droplet generator refill
Mean Time to Repair (
hrs)
Current Vessel NXE:3400C
MTTR includes total time for diagnostics, access, part replacement and system recovery (green to green)
4x
3x
NXE:3400C improves serviceability and reduces maintenance time
with new vessel
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NXE:3300B
Degradation rate
[%/GP]
0.6
Power [W] 80
Swap time [hr] 120
NXE:3350B
Degradation rate
[%/GP]
0.4
Power [W] 125
Swap time [hr] 50
NXE:3400B
Degradation rate
[%/GP]
0.15
Power [W] 250
Swap time [hr] 28
Far Field EUV intensity
(image of the collector)
Reduced EUV collector degradation and swap times
leading to higher productivity and availability
Collector lifetime improvements
4x reduction in collector degradation at 3x higher power
Normalized average collector reflectivity
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