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Slide 40 Industrial high power CO 2 laser High beam quality for ga in extraction and EUV generation ▪ 4 casc aded power amplifiers (P As) in HP AC ▪ Individuall y optimized geometry and settings ▪ Connected by relay opti…
Slide 39
EUV System overview
Scanner
Vessel
Final
Focus
Assembly
Beam
Transport
System
Drive Laser
Ancillaries
Drive Laser
Common Housing
[Power Amplifiers]
Public
Slide 40
Industrial high power CO
2
laser
High beam quality for gain extraction and EUV generation
▪ 4 cascaded power amplifiers (PAs) in HPAC
▪ Individually optimized geometry and settings
▪ Connected by relay optics
▪ Extensive metrology between amplifiers & at DL exit
PA0 PA1 PA2 PA3
HPSM
On-droplet
High Power Amplifiers
BTS
Public
NXE:3XY0 EUV Source: Main modules
Populated vacuum vessel with tin droplet generator and collector
Slide 41
Droplet Generator
Droplet Catcher
EUV Collector
Intermediate Focus
Public