S1.pdf - 第62页
Slide 62 Improved debris mitigation At 250 watt of EUV po wer Dat a from the EUV source developmen t s ys t em 0 0.2 0.4 0.6 0.8 1 1.2 0 10 20 30 40 Collector reflectiv ity [arb.] Pulse coun t [Billion Pulses] Public
Slide 61
NXE:3300B
Degradation rate
[%/GP]
0.6
Power [W] 80
Swap time [hr] 120
NXE:3350B
Degradation rate
[%/GP]
0.4
Power [W] 125
Swap time [hr] 50
NXE:3400B
Degradation rate
[%/GP]
0.15
Power [W] 250
Swap time [hr] 28
Far Field EUV intensity
(image of the collector)
Reduced EUV collector degradation and swap times
leading to higher productivity and availability
Collector lifetime improvements
4x reduction in collector degradation at 3x higher power
Normalized average collector reflectivity
Public
Slide 62
Improved debris mitigation
At 250 watt of EUV power
Data from the EUV source development system
0
0.2
0.4
0.6
0.8
1
1.2
0 10 20 30 40
Collector reflectivity [arb.]
Pulse count [Billion Pulses]
Public
EUV Source Power Outlook
Slide 63
Public