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EUV Source Power Outloo k Slide 63 Public
Slide 62
Improved debris mitigation
At 250 watt of EUV power
Data from the EUV source development system
0
0.2
0.4
0.6
0.8
1
1.2
0 10 20 30 40
Collector reflectivity [arb.]
Pulse count [Billion Pulses]
Public
EUV Source Power Outlook
Slide 63
Public
>250W is now demonstrated,
Shipping started in the end of 2017
Progress for in EUV power: 250W
EUV power
(source/scanner interface, [W])
CO
2
power [W]
Conversion
Efficiency
*
1 – Dose
Overhead
*
Increase average and peak laser power
Enhanced isolation technology
Advanced target formation technology
Improved dose-control technique
Slide 64
Public
Operation Parameters
Repetition Rate
50kHz
MP power on droplet
21.5kW
Conversion Efficiency
6.0%
Collector Reflectivity
41%
Dose Margin
10%
EUV Power
250 W