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Slide 55 3D measurement of fast tin ion distributions Faraday cups mea sure tin ion distributions LA SER Ion measurements inf orm H 2 flow r equir ements f or source Target direction Laser direction FC direction Faraday …
Slide 54
Debris in the tin LPP EUV source
Primary debris – directly from plasma and before
collision with any surface:
➢ Heat and momentum transfer into surrounding gas
o Kinetic energy and momentum of stopped ions
o Absorbed plasma radiation
➢ Sn flux onto collector
o Diffusion of stopped ions
o Sn vapor
o Sn micro-particles
Sn
Sn
Sn vapor (diffusion debris)
Sn particles
Sn
+
Fast Sn ions (line of sight debris)
Public
Slide 55
3D measurement of fast tin ion distributions
Faraday cups measure tin ion distributions
LASER
Ion measurements inform H
2
flow requirements for source
Target direction
Laser direction
FC direction
Faraday cup
Red = more
Blue = less
Public
Slide 56
Measurement of fast tin ion and radiation distributions
Multiple sensors on a rotating frame
Sensors
• Faraday Cups: ion energy and charge distributions
• CO
2
PEMs: scattered infrared radiation
• EUV PDs: EUV emission and anisotropy
Applications
• Input to Plasma-Gas Interaction /
Computational Fluid Dynamics model
• Evaluation of collector protection capability
• Improvement of Conversion Efficiency
Public