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Slide 47 Droplet Generator: Principle of Operation Large separation between the dro plets by special modul ation T in dropl ets at 80 kHz and at differe nt applied pressures. Images taken at a distan ce of 200 mm from th…
Slide 46
Forces on Droplets during EUV Generation
High EUV power at high repetition rates drives requirements
for higher speed droplets with large space between droplets
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Droplet deformations induced
by LPP of previous pulses
Lowest vibrational
mode n=2
Slide 47
Droplet Generator: Principle of Operation
Large separation between the droplets by special modulation
Tin droplets at 80 kHz and at different applied pressures.
Images taken at a distance of 200 mm from the nozzle
1.5 mm
Increasing
Droplet Generator
Pressure
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Slide 48
Increase of droplet spacing
Larger separation between the droplets needed for higher pulse energies
Droplet spacing of 1.5 mm demonstrated at 80 kHz
30 40 50 60 70 80 90 100 110 120
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
Droplet Spacing vs Frequency vs Pressure
14 MPa
28 MPa
42 MPa
56 MPa
70 MPa
84 MPa
140 MPa
Droplet-to-droplet distance, mm
Frequency, kHz
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