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>250W is now demonstrated, Shipping started in the end of 2017 Progress for in EUV power: 250W EUV power (source/scann er interfac e, [W ]) CO 2 power [W] Conv ersion Efficiency * 1 – Dose Overhead * Increase averag…
EUV Source Power Outlook
Slide 63
Public
>250W is now demonstrated,
Shipping started in the end of 2017
Progress for in EUV power: 250W
EUV power
(source/scanner interface, [W])
CO
2
power [W]
Conversion
Efficiency
*
1 – Dose
Overhead
*
Increase average and peak laser power
Enhanced isolation technology
Advanced target formation technology
Improved dose-control technique
Slide 64
Public
Operation Parameters
Repetition Rate
50kHz
MP power on droplet
21.5kW
Conversion Efficiency
6.0%
Collector Reflectivity
41%
Dose Margin
10%
EUV Power
250 W
Slide 65
500W in-burst EUV power demonstration
Demonstrated on the development system at 80 kHz
0 1 2 3 4 5 6 7 8 9 10
0
2000
4000
6000
8000
10000
12000
14000
16000
Number of pulses
EUV pulse energy, mJ
500 W
450 W
EUV source power and key technology steps
Open loop, 15 ms Bursts, 80 kHz,
3% duty cycle
On the development system
EUV pulse energy histograms
Historical trend: ~ two years from
demonstration in research to a product
Public