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Simulation of the EUV source The plasma code’s outpu ts were proces sed to produce synthetic source data. The comparis on to experiments helps to validate the code and unders tand it’s accura cy . Measured Shadowg rams S…

Plasma simulation capabilities

Main-pulse modeling using HYDRA

Main-pulse

shape

1D simulations are fast and useful

for problems that require rapid

feedback and less accuracy

3D:

+ real asymmetric

profile

2D and 3D

simulations are run

for the full duration

of the Main pulse.

Results include

temperature,

electron density,

spectral emission,

etc.

Target

Sn target using a real

irradiance distribution

1D:

real pulse shape

2D:

+ symmeterized

beam profile

Electron density (top half) with laser light (bottom half)

500μm500μm500μm

500μm

Power (arb. Units)

Time

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Simulation of the EUV source

The plasma code’s outputs

were processed to produce

synthetic source data. The

comparison to experiments

helps to validate the code and

understand it’s accuracy.

Measured Shadowgrams

Simulated Shadowgrams

Simulated EUV spectra

Emission anisotropy

Collector rim

Reflected laser modeling

Conversion Efficiency (%)

Target Diameter (µm)

Fluence

(J/cm2/S/mm)

Wavelength (nm)

Simulation

Conversion Efficiency

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EUV Source: Architecture

and Operation Principles

Slide 36

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