S1.pdf - 第22页

Slide 22 EUV Source operation at 250W with 99.90% fields mee ting dose spec 98.0 98.5 99.0 99.5 100.0 0 50 100 150 200 250 May 2018 June 2018 July 2018 August 2018 Source pow er (W) Die y ield (%) Public

100%1 / 70
250W EUV power, Source availability >85%
Customers have started HVM
Slide 21
• (left) 250W EUV power meeting dose stability requirements
• (right) >85% Source Availability over 13 weeks at customers,
without configuration repair / upgrades
Public
Slide 22
EUV Source operation at 250W
with 99.90% fields meeting dose spec
98.0
98.5
99.0
99.5
100.0
0
50
100
150
200
250
May 2018 June 2018 July 2018 August 2018
Source
power
(W)
Die
yield
(%)
Public
Slide 23
Dose Performance and Slit uniformity show stable results
Supporting requirements for 5 nm node CD control
0.0
0.5
1.0
1.5
2.0
2.5
3.0
A B C D E F G H I J K L M N O P Q R S T U V W
NXE:3400B
Dose System Performance, DSP
Slit uniformity
Dose performance [%]
Public