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EUV Collection Debris management Slide 50 Public

Slide 49

Droplet generator history

Improvements in performance and availability

Public

EUV Collection

Debris management

Slide 50

Public

Slide 51

Collector Protection by Hydrogen Flow

Sn droplet /

plasma

H

2

flow

Reaction of H radicals with Sn

to form SnH

4

, which can be

pumped away.

Sn (s) + 4H (g) → SnH

4

(g)

• Hydrogen buffer gas (pressure

~100Pa) causes deceleration of ions

• Hydrogen flow away from collector

reduces atomic tin deposition rate

Laser beam

Intermediate

Focus

Sn

catcher

DG

EUV collector

• Vessel with vacuum pumping to

remove hot gas and tin vapor

• Internal hardware to collect micro

particles

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