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Slide 61 NXE:3300B Degradation rate [%/GP] 0.6 Power [W ] 80 Swap time [ hr ] 120 NXE:3350B Degradation rate [%/GP] 0.4 Power [W ] 125 Swap time [ hr ] 50 NXE:3400B Degradation rate [%/GP] 0.15 Power [W ] 250 Swap time […
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Collector Mirror Droplet generator replacement Droplet generator refill
Mean Time to Repair (
hrs)
Current Vessel NXE:3400C
MTTR includes total time for diagnostics, access, part replacement and system recovery (green to green)
4x
3x
NXE:3400C improves serviceability and reduces maintenance time
with new vessel
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NXE:3300B
Degradation rate
[%/GP]
0.6
Power [W] 80
Swap time [hr] 120
NXE:3350B
Degradation rate
[%/GP]
0.4
Power [W] 125
Swap time [hr] 50
NXE:3400B
Degradation rate
[%/GP]
0.15
Power [W] 250
Swap time [hr] 28
Far Field EUV intensity
(image of the collector)
Reduced EUV collector degradation and swap times
leading to higher productivity and availability
Collector lifetime improvements
4x reduction in collector degradation at 3x higher power
Normalized average collector reflectivity
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Improved debris mitigation
At 250 watt of EUV power
Data from the EUV source development system
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Collector reflectivity [arb.]
Pulse count [Billion Pulses]
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