S1.pdf - 第49页
Slide 49 Droplet generator history Improvem ents in performance and availability Public
Slide 48
Increase of droplet spacing
Larger separation between the droplets needed for higher pulse energies
Droplet spacing of 1.5 mm demonstrated at 80 kHz
30 40 50 60 70 80 90 100 110 120
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
Droplet Spacing vs Frequency vs Pressure
14 MPa
28 MPa
42 MPa
56 MPa
70 MPa
84 MPa
140 MPa
Droplet-to-droplet distance, mm
Frequency, kHz
Public
Slide 49
Droplet generator history
Improvements in performance and availability
Public
EUV Collection
Debris management
Slide 50
Public