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Slide 3 And it’ s here: we see EUV - enabl ed chips in 2019 EUV up and running in High V olume Manufacturing Public

• EUV lithography in HVM

• Background and History

• EUV Lithography with NXE:3400B

• Principles of EUV Generation

• EUV Source: Architecture

• EUV Sources in the Field

• Source Power Outlook

• Summary

Outline

Slide 2

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Slide 3

And it’s here: we see EUV - enabled chips in 2019

EUV up and running in High Volume Manufacturing

Public

Advantages of EUVL : Samsung Infographic

Lower patterning cost (limiting multiple exposures)

In a full fab, EUV enables higher output

Slide 4

https://news.samsung.com/global/infographic-euv-samsungs-latest-investment-on-developing-next-generation-semiconductor-products

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