4M184002w_F8S.pdf - 第81页

4OM-1840 1-4-6 1604-001    Filter Holder Fig. 4A4-7    …

4OM-1840

1-4-51604-001

4.1.4 Filter Cleaning

Cycle : Every 3 Months (Required Time : 5 minutes)

Filter

Fig. 4A4-5

Procedure

  

case removing jig to remove the cover.

Fig. 4A4-6

4.1 Air Source

4OM-1840

1-4-61604-001

 

Filter Holder

Fig. 4A4-7

 

 

 

Note



4.1 Air Source

4OM-1840

1-4-71604-001

4.2 Vacuum System

Vacuum Pressure

Every Day Inspection

Required Time: 1 minute

Fig. 4A4-8

4.2 Vacuum System