KE-2050-KE-2060 使用说明书.pdf - 第811页
◆ 修订履历 (KE-2050/2060) Rev 日期 修订页 修订内容 00 2003.03 初版 01 2003.05 封页、目录、 1-4 、 1-14 、 1-22 、 1-33 ∼ 36 、 1-48 、 2-6 、 2-8 、 2-9 、 2-25 、 2-55 、 2-57 3-1 、 3-11 ∼ 37(3-11 ∼ 3-36 主要变更页码 ) 4-2 ∼ 5 、 4-61 、 4-79 、 4-140 、 4-210…

索引
i-6
优化条件的设定 ··························4-109
预热 ··············································2-13
预旋转角度····································4-63
元件 ······························· 4-100,6-1,6-7
元件ID···········································4-28
元件包装方式 ······················· 4-37,4-40
元件补充 ·····································2-102
元件层···········································4-53
元件查看器··························· 6-11,6-15
元件尺寸图例 ································13-1
元件废弃位置 ································8-16
元件供给角度 ······················· 4-40,4-45
元件供给数··································4-109
元件忽略 ·······································4-52
元件拒绝 ·······································4-51
元件名···········································4-28
元件前头位置 ································4-42
元件数···········································4-42
元件数据 ·········································6-4
元件数据 ································ 4-5,4-35
元件吸取真空压力·························4-49
元件验证 ·······································9-35
元件用尽 ·······································2-90
元件种类 ·······································4-37
元件组······································ 6-3,6-5
运行信息数据的重设 ···················10-28
【
Z
】
暂停 ··············································2-36
粘贴 ············································4-130
粘贴矩阵 ·····································4-137
照明控制数据 ······························4-102
照明条件(图案)设定 ····················4-159
真空台···········································8-29
真空校准 ·····································11-17
生产信息 ·······································2-44
支撑台···········································8-28
直径检查、变形检查 ·····················4-96
指示灯图案··································4-102
注册 ················································5-9
注释 ··············································4-37
装置运行信息 ······················· 1-52,10-1
状态 ··············································4-76
追加················································ 5-9
桌面·············································· 1-48
姿态控制 ···································· 4-101
自动基板宽度调整 ········ 2-19,2-52,9-21
自动校准 ······························ 1-51,11-1
最小平方法································· 12-27

◆ 修订履历(KE-2050/2060)
Rev
日期 修订页 修订内容
00
2003.03 初版
01 2003.05
封页、目录、
1-4、1-14、1-22、1-33∼36、1-48、
2-6、2-8、2-9、2-25、2-55、2-57
3-1、3-11∼37(3-11∼3-36 主要变更页码)
4-2∼5、4-61、4-79、4-140、4-210∼4-212
5-25、5-26
6-13
8-3、8-7∼35(删除 8-3-3 后的页码的变更)
13-3、13-26
追加索引
<Ver.1.01>
·多语言对应
·追加索引
·追加挡片更换方法及
易损件表
·错误订正等
02 2003.08
封页、目录、
注意 Ⅲ
1 章、 1-3、1-11、1-13、1-34、1-42、1-43、1-47、1-48、
1-49、1-50、1-52、1-62、1-69、1-70、
2 章、 2-4、2-13∼15、2-17、2-19∼27、2-33、2-41、
2-45、2-46、2-50、2-60、2-61、2-62、2-64、2-90、
2-97、2-98、2-99、2-101、2-102、2-141
(追加 2-4-1 8-3-3 后的页码的变更)
3 章、3-19、3-25、3-37
4 章、4-13、4-27、
4-29、4-34、4-35、4-50、4-54、
4-69、4-72、4-73、4-110、4-123、4-128、
4-129、4-131、4-136、4-137、4-141∼215
(追加 4-5-1-2 后的页码的变更)
7 章、 7-5
8 章、 8-1、8-8、8-14、8-16、8-22
9 章, 9-3、9-9、9-11、9-12、9-15、9-17、9-18、
9-19、9-24、9-38
10 章、10-27、10-28∼32
12 章、12-13、12-22
13 章、13-26、13-43
索引、 ⅰ-1∼ⅰ6
修订履历
<本体对应 Ver1.02>
·改进编辑排序功能
·追加 VCS 识别重试
功能
·追加设备信息保存功
能等
02a 2003.09
2 章、 2-128,2-129,2-130,2-131,2-132,2-144
<本体对应
Ver1.02D>
03 2003.11
封页、目录、
1 章、 1-3、1-14∼1-16、1-20,1-21,1-21、1-48,1-50,1-62,
1-67,1-69,1-70
2 章、 2-4,2-9,2-144
4 章、 4-142
7 章、 7-1,7-3∼7-8
12 章、12-8,12-9,12-24
13 章、13-26
索引、 ⅰ-4
修订履历
<Ver.1.03>
·追加 EXTRA
z 规格、外观等如有变更,恕不另行通告。
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