Oxford-100-Manual.pdf - 第13页
Health and Safety Oxford Instruments Plasma Technology Plasma lab and lonfab 1. Health and Safety A I'attention des clients de langue fran~aise Le document hygiene et securite est disponible en fracais. Vous devez v…
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89
Issue
6
SYSTEM READINESS FORM
This
form
is
provided in order
for
us
to
record
the
level
of
work
that
you have conducted,
to
support
the
installation
of
your
new
Oxford
Instruments system. The system should be installed,
within
the
parameters listed
below
and
the
form
returned
to
your
supporting
Oxford
Instruments office. Returning this
form
signifies
that
you have completed
the
installation
of
the
system, in accordance
with
the
Services
and Specifications data sheet and
that
the
installation conforms
with
all
of
the
requirements listed
within.
Should you
not
have a copy
of
the
afore-mentioned
"Services & Specifications" data sheet, you should contact
your
supporting
Oxford Instruments
office
immediately
and
obtain
a copy.
Should
this
form
be
received,
an
engineer
dispatched
to
start
commissioning
and
any
of
the
facilities
requirements
not
be
met,
Oxford
Instruments
reserves
the
right
to
terminate
that
commissioning
visit
and
charge
the
customer
for
a
return
visit,
once
the
facilities
have
been
fully
completed.
Company
Name:
Company
Contact
Name:
System
Serial
System
Type:
Number:
Please
tick
appropriate
box
YES
NO
Detail
1. Has
the
system
been
sited?
Attach
site
plan
if
available.
2.
Has
the
system
been
installed
in a
clean
room?
3.
Are
there
any
special
requirements
for
gaining
access
into
the
clean
room?
ie.
clearance,
trainina,
citizenship
etc
.. If
so
please
list
below.
4.
Have
pumps
been
sited
and
the
cables
between
each
pump
and
system
power
box
been
connected?
5. Has
the
gas
pod
been
sited,
connected
to
the
system
and
connected
in
to
the
appropriate
gas
delivery
and
exhaust
extraction
systems,
in
accordance
with
local
safety
regulations?
6. If
the
system
has
a
heater
chiller,
has
this
been
sited,
connected
to
the
lower
electrode
cooling
circuit
and
filled
with
Hexid A40?
Page 1
of
4
Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
1.
Health
and
Safety
A
I'attention
des
clients
de
langue
fran~aise
Le
document
hygiene
et
securite est disponible en fracais. Vous devez
vous assurer
que
cette
version est presente dans
ce
manual.
Si
elle est
manquante
contactez
votre
representant
Oxford
Instruments Plasma
Technology.
Fur
deutschsprachige
Kunden
besteht dieses Kapitel
"Health
and Safety"
unter
dem Titel "Sicherheit
und
UnfaliverhUtung"
auch
in
deutscher Fassung, die in diesem
Handbuch
enthalten
sein sollte. Falls diese
fehlt,
fordern
Sie
bitte
ein
Exemplar bei
Oxford
Instruments Plasma Technology an.
':'(J)~~I!t"
(Health
and
Safety)
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Contents
1
Health
and
Safety
1·1
1.1
Introduction
1-2
1.1.1 Warnings and Cautions 1-2
1.2 Hazard Categories 1-3
1.3 Specific Hazards 1-4
1.3.1 Electrical 1-4
1.3.2 Electromagnetic Radiation 1-5
1.3.3
Light
1-6
1.3.4
High
Temperature
1-7
1.3.5
Low
Temperature
1-7
1.3.6
Gases
1-8
1.3.7 Materials 1-10
1.3.8 Process Chemicals 1-12
1.3.9 Vacuum 1-12
1.3.10 Compressed air 1-13
1.3.11 Mechanical 1-13
1.3.12 General. 1-14
1.4
Warning
and advisory labels 1-16
Printed:29 May 2005, 06:31
Health and Safety
Page
1-1
of
18
Issue
11:
August
2004
Plasmalab
and
lonfab
1.1
Introduction
Oxford
Instruments
Plasma
Technology
Health and Safety
1.1.1
This section must be read and
understood
before
the
system
is
approached
or
operated
and
before
any maintenance
work
is
carried out.
It
is
a
requirement
that
procedures and practices
taught
in
Oxford
Instruments Plasma
Technology
training
courses are
followed.
If
the
equipment
is
used
in
a
manner
not
specified by
Oxford
Instruments Plasma Technology,
the
protection
provided
by
the
equipment
may be impaired.
Please read this section carefully, and
note
that
certain aspects
of
the
system can produce
more
than
one
hazard (e.g. process gases can be a
fire
hazard and a toxic hazard).
Some safety features are
fitted
to
guard
against
more
than
one
hazard. In particular,
note
that
some
view
ports must
guard
against UV
light
emission (sub-section 1.3.3, page 1-6),
RF
energy
emission (sub-section 1.3.2, page 1-5) and must
be
fitted
with
implosion guards.
Note
that
this
document
is
standardised and may contain warnings,
which
are
not
relevant
to
your
particular
system.
Warnings
and
Cautions
Throughout
this manual WARNINGS are inserted in
the
text
to
draw
the
reader's
attention
to
hazards. Failure
to
comply
with
a WARNING could result in
death
or
serious injury. A
typical
warning
is
shown below:
HOW
TO
AVOID
THE HAZARD
:Any
work
rec,ulring
the
removal
of
covers
or
panels
mu
stan
iy
be
performed-by
autiiorised"
I
I
personnel
who
are aware
of
the
hazards involved. :
I
I
Before
removing
any
covers
or
panels,
power
down
the
system
then
carry
out
the
lock
out
I:
: tag
out
procedure
detailed
in
Section
6.
I
~------------------------------\----------------------~
PICTORIAL SHOWING THE \
HAZARD CATEGORY GRAPHICALLY
Throughout
this manual CAUTIONS are inserted in
the
text
to
draw
the
reader's
attention
to
situations and procedures,
which
could cause damage
to
the
equipment.
A typical CAUTION
is
shown
below:
CAUTION
Upper
electrodes
can
become
contaminated
from
finger
marks
etc.
When
working
on
the
upper
electrodes,
ensure
that
powder-free
cleanroom
gloves
are
worn.
Issue
11:
August
2004
Health and Safety
Page 1-2
of
18
Printed:29
May
2005, 06:31