Oxford-100-Manual.pdf - 第17页

Health and Safety Oxford Instruments Plasma Technology Plasma lab and lonfab 1.3.2 Electromagnetic Radiation WARNING HAZARDOUS RF AND MICROWAVE EMISSIONS· EXPOSURE CAN CAUSE SEVERE INJURY OR BURNS Before operating the Sy…

100%1 / 362
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
Health and Safety
1.3
1.3.1
Specific Hazards
Electrical
WARNING
HAZARDOUS
VOLTAGE·
CONTACT CAN CAUSE DEATH, SEVERE INJURY
OR
BURNS
Any
work
requiring
the
removal
of
covers
or
panels
must
only
be
performed
by
authorised
personnel
who
are
aware
of
the
hazards
involved.
Before
removing
any
covers
or
panels,
power
down
the
system
then
carry
out
the
lock
out
I
tag
out
procedure
detailed
in
Section
6.
1.3.1.1 Parts
of
the
system carry
high
voltages,
which
are capable
of
causing
injury
or
death.
Take
great
care
when
carrying
out
maintenance tasks.
1.3.1.2 Do
not
operate
the
system
if
any
of
the
doors, panels
or
covers are removed. Parts
of
the
system may still be 'live' even
when
shut
down
by
a switch,
blown
fuse
or
control
function.
Note
that
the
system
POWER
OFF
button
does
not
isolate
the
main
distribution
panel.
1.3.1.3 Ensure
that
all system units are connected
to
electrical
earth
(ground). For details
of
the
required
electrical installation,
refer
to
the
'Services Specifications
for
Plasma
lab
and
lonfab
systems'
document
which
is
included
at
the
rear
of
this
manual's binder.
1.3.1.4
During
troubleshooting
and calibration,
the
power
supplies may need
to
be
connected
with
live components exposed. This
work
must
only
be
carried
out
by
skilled
personnel
who
are
aware
of
the
hazards
involved.
1.3.1.5 Ensure
that
all safety interlocks are tested
before
the
system
is
used
for
the
first
time
and
at
scheduled intervals
thereafter.
These
tests
must
be
carried
out
by
suitably
qualified
personnel.
1.3.1.6 Inspect
the
system
regularly
for
damaged components, e.g. cables, connectors
or
switches.
Any
components
found
damaged must be replaced
before
continuing
to
operate
the
system. Refer
to
the
instructions in
the
maintenance
section
of
this
manual
for
details
of
any
particular
tests
of
the
cables
that
may be required.
1.3.1.7
If
any
water
leaks are detected,
immediately
switch
the
system
off
at
the
main
incoming
circuit
breaker.
1.3.1.8 No servicing
is
to
be carried
out
unless all personnel involved
fully
understand
the
danger
of
stored electrical energy. Refer
to
the
lock
out
I
tag
out
procedure
detailed
in Section
6.
Issue
11:
August
2004
Health and Safety
Page 1-4
of
18
Printed:29
May
2005. 06:31
Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
1.3.2
Electromagnetic
Radiation
WARNING
HAZARDOUS
RF
AND
MICROWAVE
EMISSIONS·
EXPOSURE CAN CAUSE
SEVERE
INJURY OR BURNS
Before
operating
the
System
On
button,
ensure
that
all
RF
and
I
or
microwave
shielding
is
correctly
fitted
and
that
all
connectors
and
flanges
are
in
place.
1.3.2.1 Parts
of
the
system produce electromagnetic
radiation
from
audio
frequencies
to
2.45 GHz.
At
all frequencies
within
this range
there
is
a
field
strength
level
at
which
radiation
can cause injury.
Oxford
Instruments Plasma Technology specifies limits
for
the
Electric and
Magnetic
field
strengths
within
the
environment
of
the
system.
The system must be tested
to
ensure
that
radiation
is
within
these limits, using
suitably
calibrated
equipment.
The tests must be carried
out
after
maintenance
involving
RF
shielding components, and
routinely
every
three
months. Refer
to
the
instructions
in
the
maintenance section
of
this manual.
1.3.2.2 Ensure
that
all
waveguide
components, flanges and cables are correctly
fitted,
secure and undamaged.
View
ports
on
Plasmalab systems and on certain
lonfab
systems are
fitted
with
a
metal
grid
for
shielding
RF
radiation. Replace this
item
only
with
the
correct part,
and ensure
that
the
ports are correctly reassembled.
If
a
metal
grid
is
not
fitted
and
there
is
any
doubt
about
whether
one should be
fitted,
you
must check
with
Oxford
Instruments Plasma Technology
before
proceeding.
If
the
view
port
has
been disassembled
then
tests must be carried
out
as
described in sub-section 1.3.2.1 above.
1.3.2.3
Operating
the
equipment
with
any panels removed increases
the
risk
of
RF
burns.
Maintenance
procedures,
which
require
this, must
only
be
performed
by skilled
persons
who
have
access
to
a suitable
field
strength
meter.
1.3.2.4 Removing panels
or
modifying
the
equipment
may increase
the
radio
interference
emitted
by
the
equipment
above
permitted
levels. This may cause nearby
equipment
to
operate
unexpectedly.
1.3.2.5
If
portable
transmitting
equipment,
e.g. radio, cellular phone, etc.,
is
used
within
two
metres
of
the
equipment,
the
equipment
could
operate
unexpectedly.
Removing panels
or
modifying
the
equipment
may increase this risk.
Printed:29 May 2005, 06:31
Health and Safety
Page 1-5
of
18
Issue
11:
August
2004
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
Health and Safety
1.3.3
Light
WARNING
LASER
RADIATION·
EXPOSURE CAN CAUSE SEVERE EVE
DAMAGE
OR BURNS
Before
operating
the
system,
ensure
that
all
covers
are
fitted
correctly.
Ensure
that
for
laser
equipment,
the
manufacturer's
instructions
have
been
read
and
full
understood.
1.3.3.1 Laser
equipment
when
handled
incorrectly
or
in
a damaged
condition
can seriously
damage eyesight. Read and
follow
the
manufacturer's
instructions carefully. Ensure
that
all covers supplied
by
Oxford
Instruments Plasma Technology
or
by
the
manufacturer
are correctly
fitted
before
the
equipment
is
powered
up.
WARNING
ULTRA VIOLET
RADIATION·
EXPOSURE CAN CAUSE SEVERE EVE
DAMAGE
OR BURNS
Ensure
that
all
view
ports
are
assembled
correctly,
and
that
any
replacement
filters
are
of
the
correct
specification.
1.3.3.2
View
ports on Plasmalab systems are
fitted
with
a clear plastic UV
filter
(Perspex
-VE-
clear-003). Replace this
item
only
with
the
correct part, and ensure
that
the
ports are
correctly reassembled.
If
a plastic
filter
is
not
fitted,
or
if
there
is
any
doubt
about
the
type
of
filter
that
is
fitted,
you
must check
with
Oxford
Instruments Plasma Technology
before
proceeding.
1.3.3.3 The customer should
be
aware
of
the
fact
that
view
ports are available in glass
or
quartz.
Most
view
ports on
Oxford
Instruments Plasma Technology systems are glass,
but
quartz
is
used in certain applications.
Quartz
view
ports
allow
much
more
UV
light
to
pass
through
than
glass does, and
so
present a
greater
hazard. They
will
require
very careful shielding
or
filtering
in ALL situations
on
Plasmalab and
lonfab
systems.
Be
careful
if
the
service
history
of
the
system
is
not
fully
known.
It
is
possible
that
a
glass
view
port
has been changed
for
a
quartz
one.
1.3.3.4 UV
light
can also escape
from
other
parts
of
the
system, e.g.
from
ICP
plasma
sources, and
downstream
plasma discharge tubes. Discharge tubes
of
this
type
are
often
made
of
quartz, and
so
very careful shielding
or
filtering
is
needed.
1.3.3.5 UV
light
can produce ozone
from
ambient
air. Detectable
quantities
are produced
by
ICP
sources
fitted
with
a
quartz
tube. Local
extraction
must be used in this
case.
Issue
11:
August
2004
Health and Safety
Page 1-6
of
18
Printed:29
May
2005. 06:31