Oxford-100-Manual.pdf - 第333页
Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 8.2 200mm pipework + 200 VAT APe (100-8-20) PROCESS CHAMBER 12 ~ N 2 ~ ------------------------- ROTARY VANE PUMP--" I…
Plasma
lab
System
100
(ICP
180)
8.1
General
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
A key to the symbols used to represent vacuum system components
in
the following illustrations is shown in the following
key; where no symbol exists for a component, it is either labelled
or
can be identified from the associated table.
~
Electromagnetically
S
Vacuum gauge
operated
shut-off
valve
head
~
Pneumatically
~
Turbomolecular
operated
shut-off
valve
pump
r*J
Manually operated
0
Sliding vane
variable-leak valve
rotary vacuum
pump
[)+(] Gate valve
Q
Cryogenic
pump
~
Butterfly
valve
4
Reducer
e.g. APC
TT
Vacuum flange I
IIIIII111111
Flexible pipe
adapter
E=3
Combination
of
cs;;J
Pressure
flanges I adapters
reliefvalve
Key
to
vacuum
schematic
symbols
Pumping
Pipework
Section 8 Page 2
of
6
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
8.2
200mm
pipework
+
200
VAT
APe
(100-8-20)
PROCESS CHAMBER
12
~
N
2
~
-------------------------
ROTARY
VANE
PUMP--"
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Section 8 Page 3
of
6
Pumping Pipework
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
No.
in
OIPT
Part
Number
Description
illustration
1 GVVOO012C
Nz
VENT VALVES
2
GIVAC/SU
N/032 EDWARDS VAC INTERLOCK SWITCH
3 GIVACIVL
V/125 PV25PK ISOLATION VALVE
4
M/MTR/MFMI003
MKS 100SCCM N2 FLOW METER SWAG
5 GIVACIVLV/245
200lS0
STEPGATE
VALVE.64046-PE52
6 GIVACIVLV/246 VAT APC CONTROLLER 641PM-16PM
7
GIVAC/PMP535 ALCATEL ATP900HPC TURBO IS0200
8 GIVAC/PMP/536 ALCATEL ACT100T TURBO CONTROLLER
9
GIVAC/GGE/004
ACT.INVERT.MAG.GGE.AIM-S-NW25 (PENNING UNIT)
10
GIVAC/GGE/625
100mT
MKS CAPACITIVE MANOMETER 628B.1T-D-E-1-B
11
G/SEUO-V/371 5.3 x 215.3
mm
VITON
'0'
RING
BS
371
12
GIV
AC/SEU025C
NW25
CENTRING RING ALI/VITON
12a
GIV
AC/CLP/025C
NW25
CLAMP RING
13
GIV
AC/SEU01
OC
NW10
CENTRING RING ALI/VITON
13a
GIVAC/CLP/01
OC
NW10
CLAMP RING
14
GIV
AC/SEU040C
NW40
CENTRING RING ALlIVITON
14a
GIVAC/CLPI040C
NW40
CLAMP RING
15
GIV
AC/SEU080
2001S0-K CENTRING RING ALI/VITON
16
GIVAC/FIT/280
ISO
200 - 200
TEE
17
GIVAC/FIT/240C
NW40TEE
18
GIVAC/FLX/325
NW25
0.5M
PIPE
19
GIVAC/FIT/004C
NW25/NW16
REDUCER
C105-14-447
20
GIVAC/FIT/005C
NW40/NW25
REDUCER
Pumping
Pipework
Section 8 Page 4
of
6
Issue
2:
November
02
Printed: 16-Jan-06, 15:55