Oxford-100-Manual.pdf - 第306页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 3.1 ICP180 chamber kit 200LF pipe (100-3-41C) Process Chambers Section 3 Page 2 of 4 DETA!lA @ --~@ .. _@ .~-@ ~@ DETA!l B …

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Plasmalab System 100
(ICP180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 3 - Process chambers
Section 3 - Process chambers 1
3.1
ICP180 chamber
kit
200LF
pipe
(1
00-3-41
C)
2
3.2 Common process chamber
option
spares 4
3.3
ICP180 source
option
spares 4
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Section 3 Page 1
of
4
Process
Chambers
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts Catalogue
3.1 ICP180
chamber
kit
200LF
pipe
(100-3-41C)
Process Chambers
Section 3 Page 2
of
4
DETA!lA
@
--~@
..
_@
.~-@
~@
DETA!l B
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Plasma
lab
System
100
(ICP180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
Item
No.
OIPT
Part
No.
Qtv
Description
MAOOZ22821
ICP180
(ALUMINA
TUBE) HINGED ASSEMBLY
1 MD81C15834 1 NW25KF FLANGE (INTERFEROMETRY)
2
G/SELIO-K/117
1
2.62 x 20.3
mm
K'REZ
'0'
RING
BSl17
3 G/SELIO-K/219 1 3.53 x 32.9
mm
K'REZ
'0'
RING BS219
4
MD81D15869
1 GASKET
5
G/SELIO-K/235
1
3.53 x 79.0
mm
K'REZ
'0'
RING BS235
6
MD81D15847
1 RING
7
MAOOB21488 1 FLOATING TOP WELD
MC
ASSY-ICP
8
G/SELIO-K/264
2
3.53 x 190.1
mm
K'REZ
'0'
RING BS264
9 GIV
AC/SELlO15C
1
NW16
CENTRING RING ALlIVITON
10
GIV
AC/FIT
1323C
1
16KF BLANK FLANGE
11
MDOOD18558 1 VALVE BLOCK
12
MDOOB23127 1 CERAMIC TUBE WATER COOLING RING
13 MDOOD21388 1
SUPPORT
PILLAR
14
MDOOB18547 1
RF
SHIELD
15
MDOOB18549 1
COIL (4)
ICP
SOURCE
16
G/GAS/F
IT
1284C
1
Y4
UNION
17 MDOOA23821 1 BACK
PLATE
HINGED
18
G/GAS/FlT/274C 2
Y4
BULKHEAD UNION
19
G/GAS/FIT/276C
2
3/8
BULKHEAD UNION
20
G/SUN/BSH/116
4 8 x 12 x
12
mm
OILiTE
BUSH
CM16
21
MD91D17198
2 HINGE
PIN
22
G/SUN/SPG/923
2
GAS
SPG
6-60-220-MB-MB-RV400N
23 MDOOD18551 3
SPACER
BLOCK
24
MDOOD18552 3
SPACER
BLOCK HALF
25*
MD81D16140
1
WINDOW
FLANGE
26*
G/FIXlS32/625 4
M6
x 25
mm
SIS
CAPHEAD
SCREW
27*
MD81D14211
1 UV/RF
FILTER
28*
M/4175D/Ol
1
WINDOW
GASKET
29*
M/0651D/01
1
WINDOW
GLASS
(6
mm
PYREX)
30*
MAOOD14711 1
NW40
CENTRING RING
MOD
31
MD91D20353
1 CHAMBER 200LF STANDARD
32
G/SELIO-V/263C
1 3.5 x 196.4
mm
VITON
'0'
RING BS263 (PART
OF
ITEM 33
AND
MOUNTED ON ITEM 33)
33 GIVACIVLV/930
1
MONVAT
VLV 46 x 236 02010-BA24
34
GIV
AC/SELl040C
1
NW40
CENT.
RING ALlIVITON
35
GIV
AC/FlT/327C
1 40KF BLANK FLANGE
36
GIVAC/CLP/311C
4 CLAWS DN25 lS0-KF.BP220366-T
37
G/SELlO-
V
1384C
1 5.3 x 380.37
mm
VITON
'0'
RING 200-384
38
G/SUN/CAB/850 2 OVER
CENTRE
DRAW
LATCH
39
MDOOA22716 1
LID (HINGED ICP180)
40 MAOOA23828 1
AUTOMATCH
ASSY.
(VAC CAP) ICP180
41
MDOOC18541
1 QUARTZ TUBE
(ICP
SOURCE)
41a MDOOC18542 1
ALUMINA
TUBE (lCP
SOURCE)
- ALTERNATE TO ITEM
41
42 MDOOA21385 1
TOP PLATE (lCP)
43
MDOOA23852 1 ICP180
SIDE
COVER
* 25
to
30
MA91Z17161 CHAMBER VIEWPORT KIT
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Section 3 Page 3
of
4
Process Chambers