Oxford-100-Manual.pdf - 第337页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Section 9 . Gas handling Section 9 • Gas handling 1 9.1 6-line gas pod (81-9-51) 2 9.2 12-line gas pod (81-9-61) 4 9.3 Non-…

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Plasmalab System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
8.3
Pumping
pipework
option
spares
OIPT
Part
No.
Qty
Description
200
mm
VAT APC
VACUUM
KIT
GIVACIVLV/245 1 200
ISO
STEPGATE
VALVE 640046-PE52
GIVACIVLV/246 1
VAT
CONTROLLER 641PM-16PM
GIVAC/SEU080
4 200
ISO
CENTERING RING
GIVAC/SEU025 2
NW25
CENTRING RING
GIVAC/SEU040 2
NW40
CENTRING RING
GIVAC/SELl010 2
NW10
CENTRING RING 08C10511395
GIVAC/SEU068 1 DN
250
ISO-K CENTRING RING
Pumping
Pipework
Section 8 Page 6
of
6
Issue
2:
November
02
Printed:
16-Jan-06,15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section
9 . Gas
handling
Section 9 • Gas
handling
1
9.1
6-line gas
pod
(81-9-51) 2
9.2 12-line gas
pod
(81-9-61) 4
9.3 Non-toxic gas
line
(81-9-11) 6
9.4
Toxicgasline(81-9-21)
7
9.5 Clean gas
line
with
MFC
(81-9-31) 8
9.6 Clean gas
line
with
rotameter
(81-9-07) 9
9.7
Gas
handling
option
spares 10
Issue
2:
November 02
Printed: 16-Jan-06. 15:55
Section 9 Page 1
of
10
Gas
Handling
Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
9.1
6-line
gas
pod
(81-9-51)
CD
I
Gas
Handling
Section 9 Page 2
of
10
Issue
2:
November 02
Printed:
16-Jan-06, 15:55