Oxford-100-Manual.pdf - 第287页

, , III\Od ular Cluster system -ICP 180 Issue 2: November 2002

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All
OIPT Systems
Oxford
Instruments
Plasma
Technology
System
Manual
6.4
Adjustment
of
capacitor
park
positions
The capacitors drive
automatically
to
the
park
positions if:
the
AMU
is
set
to
Auto
the
RF
is
off
the
circuit
board
links enable
parking
The
park
positions can be adjusted
when
all
of
these conditions are satisfied, by
altering
the
corresponding
potentiometer
with
a small
flat-bladed
screwdriver. The capacitor
will
move
when
the
potentiometer
is
adjusted, and
the
park
position
is
displayed
as
the
capacitor
position.
7.
OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yatton,
Bristol, BS49 4AP
Tel: +44(0)1934837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free
+1
800-447-4717
Fax:
+1
9783698287
Email: info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Otto-von-Guericke Ring 10,
D-65205 Wiesbaden
Tel: +49(0)6122937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Issue
6:
February
05
Japan
Oxford Instruments
KK
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China
(Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No.
18
Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 1065188160/1/2
Fax: +86 1065188155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
DIPT
Automatch
Unit
Page 20
of
20
People's
Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
NO.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel:
+862163608530
Fax:
+862163608535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte.
Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel:
+6563376848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.s9
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1
F,
No
23
Jing-Shang 19
1h
Street,
Hsinchu, Taiwan
Tel:
+6563376848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.S9
Printed: 5-Jan-06. 8:03
,
,
III\Od
ular
Cluster
system
-ICP
180
Issue
2:
November
2002
Plasma
lab
System
100
(ICP
180)
Contents
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Contents
ii
Introduction
iii
Location
of
major
components
v
Section
0
System
common
components
0-1
Section 1
Intentionally
left
blank
Section 2
Intentionally
left
blank
Section
3 Process
chambers
3-1
Section 4
Intentionally
left
blank
Section
5
Lower
electrode
5-1
Section
6
RF
plasma
generation,
power
supplies
6-1
Section
7
Vacuum
measurement
7-1
Section
8
Pumping
pipework
8-1
Section
9 Process gas
handling
9-1
Section
10
Wafer
handling
options,
load
locks
and
robotics
10-1
Section
11
Spares 11-1
Section
12
Accessories 12-1
Page ii
of
vi
Issue
2:
November 02
Printed:
16-Jan-06. 15:55