Oxford-100-Manual.pdf - 第346页

Plasmalab System 100 (Iep 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 9.7 Gas handling option spares OIPT Part No. Qtv Description 81-9-51 - Externally mounted gas pod for up to six MFC lines + …

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
9.6 Clean gas
line
with
rotameter
(81-9-07)
CLEANGAS
~
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
PROCESS GAS
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
I
PROCESS GAS
OUT
TO
SYSTEM
I
CLEAN GAS IN
..--
LINE
Item
No.
in
Part
Number
Description
Illustration
MA81B15081
CLEAN GAS
LINE
(ROTAMETER) (all
welded
pipework
including
valves
but
excluding
rotameter)
G/GAS/FIT/614C 1/4 GASKET. RETAIN
SS4VCR2GR
(USED
IN ALL
VCR
FIITINGS)
1
G/GAS/ROT/800 ROTAMETER 800 CCM F65-SAHR3-A125-7SS
2
MA81D14784
INLET
PIPE
(ROTAMETER)
Issue
2:
November
02
Printed:
16-Jan-06,
15:55
Section 9 Page 9
of
10
Gas
Handling
Plasmalab System 100
(Iep
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
9.7
Gas
handling
option
spares
OIPT
Part
No.
Qtv
Description
81-9-51 -
Externally
mounted
gas
pod
for
up
to
six MFC lines +
one
rotameter
or
MFC
control
line
MA81Z16003
1
GAS POD CHAMBER A
or
B
PCB
G/AIRIVLV/506
1 6
WAY
SMC ASSEMBLY SPASBR06
ESZ9102 1 DOOR INTERLOCK MICRO-SW
SPOT
G/AIRIVLV/501 1
SINGLE
SMC ASSEMBLY
SPASBR01
G/GAS/F
IT
1614
1
Y4
RETAINING GASKET
81-9-11 1
Non-toxic
Qas
line
excludinQ mass
flow
controller
G/GAS/FIT/614
10
Y4
RETAINING GASKET
81-9-21 1 Toxic gas
line
with
MFC bypass,
excluding
mass
flow
controller
G/GAS/FIT/614
10
Y4
RETAINING GASKET
Gas
Handling
Section 9 Page
10
of
10
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section
10
-
Wafer
handling
options, load locks
and
robotics
Section
10·
Wafer
handling
options,
load
locks
and
robotics
1
10.1 Loadlock (100-10-05C) 2
10.2
Wafer
handling
option
spares 5
Issue
2;
November 02
Printed: 16-Jan-06,15:55
Section 10 Page 1
of
6
Wafer
Handling