Oxford-100-Manual.pdf - 第267页

All OIPT Systems RF Automatic Matching Unit Issue 6: February 2005 Page 1 of 20

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Equipment
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
Ie
P180
OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yalton,
Bristol,
BS494AP
Tel: +44(0)1934837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A BakerAvenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free
+1
800-447-4717
Fax:
+1
9783698287
Email: info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Olto-von-Guericke Ring 10,
0-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Issue
4:
January 06
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China
(Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86
1065188160/1/2
Fax: +86 1065188155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
ICP
180 Source
Page
26
of
26
People's Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
NO.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel: +86 216360 8530
Fax:
+862163608535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte.
Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel:
+6563376848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1F, No
23
Jing-Shang 19
1h
Street,
Hsinchu, Taiwan
Tel:
+6563376848
Fax:
+6563376286
Email: oipt.sales@oxford-
instruments.com.sg
Printed: 18-Jan-06, 8:44
All
OIPT
Systems
RF
Automatic Matching Unit
Issue
6:
February 2005
Page 1
of
20
All
OIPT Systems
Contents
Oxford
Instruments
Plasma
Technology
System
Manual
1.
Health
and
Safety
3
2.
Description
3
2.1
Introduction
3
2.2
Major
components 4
2.2.1
Automatch
control
panel 4
2.3
Matching
component
layouts 5
2.4
Sense
and
control
PCB
7
3. Test
and
setting
up
8
3.1 Overview 8
3.2
Procedure 9
4.
Operator
adjustment
13
4.1
DC
bias I Peak-to-peak switch setting 13
5.
Operation
13
6.
Troubleshooting
15
6.1 Fault diagnosis
chart
15
6.1.1
Amplifier
gain
adjustment
16
6.1.2 Drive
motor
shaft
to
capacitor spindle
alignment
17
6.2
Link Settings 18
6.3
Changing
the
RF
components 19
6.4
Adjustment
of
capacitor
park
positions 20
7. OIPT
locations
worldwide
20
Fig
1:
The
Oxford
Instruments Plasma Technology
automatch
unit
3
Fig
2:
Typical
AMU
control
panel 4
Fig
3:
Matching
component
layouts 6
Fig
4:
Sense
and
control
PCB
layout
7
Fig
5:
Capacitor shafts
rotation
direction
10
Fig
6:
Component
locations
11
Fig
7:
LK102 and
LK2
settings 16
Issue
6:
February
05
OIPT
Automatch
Unit
Page 2
of
20
Printed: 5-Jan-06, 8:03