Oxford-100-Manual.pdf - 第317页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 5.5 Lower electrode option spares OIPT Part No. Qtv Description MA91Z21747 1 RIE TABLE ASSY. (3 PIN LIFT) MA91C19809 1 BELL…

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Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
5.4
Helium
pipe
run
HELIUM PIPE RUN FOR N2 eYRO/HEATED TABLE
I
PRES CONTIMASS
FLOW
MTR MTG PL
MD91C22582
GAS CONN FLANGE
1/4"
- NW25
MDOOD17865
:J!::ll=:::::J-
<¢>
VENT PIPEWORK
GAS VALVE
G/GASNLV/009C
'\
GASVALVE
GW0012C
MKS 640 PRES CTRL50 TORR
UMTRlPRE/OO2
MKS 50SCCM He FLOW METER SWAG.
LlMTRlMFM/001 \
\
HELIUM
IN~
PLASMA GAS ISOLATOR ASSEMBLY
MAOOD25487
I
!
R.F.
BOX
TOBELLOWS.e-
WELDED ASSY.
Lower Electrode
Section 5 Page 8
of
10
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
5.5
Lower
electrode
option
spares
OIPT Part
No.
Qtv
Description
MA91Z21747
1
RIE
TABLE
ASSY.
(3
PIN
LIFT)
MA91C19809
1 BELLOWS WELDED ASSEMBLY
G/SUN/SPGI008 1
SPRING
COMPo
OlD 31.75 x 50.8 x 2.6
G/AIR/CYLl315 1 AIR CYLINDER CDW2820-15D
EQT0014
1
TYPE
17 Pt
RES
THERMOMETER
MD91
021723
4 TABLE TOP PLUG
MD91C21712
1
TABLE
UPPER
SURFACE
RIE
HELIUM BACK COOLED
LOWER
ELECTRODE
(100-5-36A)
G/AIRIVLV/502 1 SMC
ASSY.
VZ3104/5MNZ/01
G/AIR/REG/104
1
IN LINE FLOW REGULATOR AS101F-04
HELIUM
PIPE
RUN ASSEMBLY
(MA91C20442)
LlMTR/MFM/OO1 1 MKS 5SCCM He FLOW METER SWAG.
LlMTR/PREI002
1
MKS 640
PRESSURE
CONTROLLER, 50
TORR
MAOOD25487 1 PLASMA GAS ISOLATOR ASSEMBLY
GVV0012C 1
Y<i
SWAGE AIR
CLOSED
VALVE
GIGASIVLV/601 1 CHECK VALVE
2PSI
W'
SWAGELOK
GIGAS/FIT/367C 2
10
mm
PTFE
FERRULE,
BACK
GIGAS/FIT/366C 2
10
mm
PTFE
FERRULE,
FRONT
WAFER CLAMP ASSEMBLY
200
PORT
(MA91A22537)
MA91
017600
2
PIN
WELDED ASSEMBLY
G/AIRlCYLl320 2 20
mm
CYLINDER CDQ2B20-20D
G/SELIO-V/218 2 3.5 x 31.3
mm
VITON
'0'
RING BS218
G/SUN/SPGI012
6
COMPo
SPG.
LEE
No. LCM-050C-5
G/AIR/CYLl807 2
REED
SWITCH SMC No. D-A73L
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 5 Page 9
of
10
Lower
Electrode
Plasmalab
System
100
(ICP
180)
NOTES:
Lower
Electrode
Oxford
Instruments
Plasma
Technology
Section 5 Page 10
of
10
Illustrated Parts Catalogue
Issue
2:
November 02
Printed: 16-Jan-06. 15:55