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System Manual Oxford Instruments Plasma Technology OIPT Systems 2.1 Recirculation water WARNING CHILLERS HAVE COMPONENTS, WHICH BECOME COLD ENOUGH TO CAUSE SERIOUS INJURY. READ THE MANUFACTURER'S MANUALS BEFORE INST…

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OIPT Systems
Oxford
Instruments
Plasma
Technology
System Manual
2. Cooling I
Warming
water
There are
two
acceptable methods
of
applying
cooling
/
warming
water
to
an DIPT system:
Recirculation:
Water
is
pumped
through
the
system
by
a dedicated
*heater
/ chiller
or
heat
exchanger.
After
passing
through
the
system,
the
temperature
of
the
water
is
adjusted
before
recirculating
through
the
system.
*Many
customers have a
water
recirculation
facility
shared
by
several
systems. This shared
facility
seldom provides
water
of
suitable quality, and
so
cannot
usually be used
for
cooling
any
part
of
the
DIPT system
without
the
use
of
a
heat
exchanger dedicated
to
the
DIPT system.
Total
Loss
Cooling:
Municipal
(drinking
quality)
water
is
applied
to
the
system
from
a mains
supply, passed
through
the
system
to
cool
it,
then
fed
to
a
drain
for
disposal.
Water
failing
to
meet
the
recirculation
or
total
loss
cooling
specifications must
not
be
put
into
the
system
without
close consultation
with
DIPT.
In some circumstances,
it
may be
appropriate
to
use a
combination
of
recirculation
cooling
and
total
loss
cooling
in
one
system.
It
is
recommended
that
the
customer
uses
a dedicated heater/chiller
either
for
the
whole
system,
or
at
least
for
the
critical components.
Note
that
chillers,
which
cool only, can give
problems
with
condensation
on
chamber components in some environments. This
is
a
particularly
important
consideration
for
production
systems
of
the
batch-load type. In severe
cases,
they
can produce
sufficient
condensation
to
damage components such
as
RF
power
supplies,
ferrofluidic
seals and
automatch
units.
Any
damage
so
caused
cannot
be covered by
the
system
warranty.
Note
that
if
a heater-chiller
is
used
to
provide
warm
water
(above 30
0
C)
for
heated
parts
of
the
system,
then
items such
as
the
turbo
pump
will
need an
independent
water
supply.
Items such
as
turbomolecular
pumps can be cooled
with
total
loss
cooling
if
they
are
of
stainless steel construction and
if
the
water
is
suitable.
If
the
water
is
not
suitable,
then
a
heat
exchanger may be necessary.
Total
loss
cooling
cannot
be
used
on
any
components
that
have
aluminium
in
direct
contact
with
the
coolant.
See
sub-section
2.1.
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16:
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05
Services Specifications
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System
Manual
Oxford
Instruments
Plasma
Technology
OIPT Systems
2.1
Recirculation
water
WARNING
CHILLERS HAVE COMPONENTS, WHICH BECOME COLD ENOUGH
TO
CAUSE SERIOUS
INJURY. READ
THE
MANUFACTURER'S MANUALS
BEFORE
INSTALLING, OPERATING
OR
MAINTAINING
CHILLERS,
AND
ENSURE THAT ADEQUATE PROTECTIVE CLOTHING
IS
WORN.
Recirculation
water
is
used in systems
where
the
user does
not
wish
to
consume
water
at
a
high
rate,
or
where
it
is
wished
to
supply
water
to
the
system
at
a constant
temperature.
Some systems
contain
aluminium
in
direct
contact
with
coolant. These are
the
lonfab
500
Plus,
the
lonfab
300
Plus,
and
Plasma
lab
systems
fitted
with
tables
or
turbomolecular
pumps
with
plain
aluminium
cooling
channels. Certain
aluminium
chambers are also included.
However,
the
lonfab
300
Plus
does
not
contain
aluminium
in
contact
with
water,
unless
it
is
in
the
turbomolecular
pump.
In these
aluminium-containing
systems,
it
is
MANDATORY
that
the
approved
coolant
is
used
at
all times.
If
the
approved
coolant
and
installation
are
not
used,
the
system
warranty
will
not
cover any
damage
caused by
the
coolant
either
directly
or
indirectly
to
the
system
or
to
anything
else.
It
is
the
customer's responsibility
to
comply
with
the
above requirement.
If
the
customer has
any
doubt
as
to
whether
their
system falls
into
this category,
they
must
contact
OIPT
for
further
advice.
In systems
that
do
not
contain
aluminium
components, severe corrosion can still sometimes
occur:
water
will
collect corrosive chemicals, and
will
be lacking in
the
oxygen
that
protects
stainless steel.
We
strongly
recommend
that
the
approved
coolant
is
used.
If
an
alternative
product
or
water
is
used,
then
it
is
entirely
the
customer's responsibility
to
check
for
any signs
of
corrosion
or
contaminated
water.
If
the
customer's
coolant
has
not
been approved in
writing
by
OIPT,
then
the
system
warranty
will
not
cover any damaged caused by
the
coolant
either
directly
or
indirectly
to
the
system
or
to
anything
else'.
The approved
installation
and
coolant
are shown in sub-section 2.1.1 and in Fig 2.1.
Note
that
the
total
water
flow
meter
and
the
isolation valves are recommended
for
cooling
monitoring
and ease
of
maintenance.
, Customers should note.
for
example,
that
certain types
of
inhibitor
will
damage
the
pumps
of
heater/chiller units, and
that
the
use
of
municipal
(drinking
water)
or
deionized
water
can
introduce
harmful
chemicals
into
the
system.
If
plain
water
is
used, distilled
water
is
by
far
the
safest
option.
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Services Specifications
Page 5
of
22
Issue
16:
April
05
OIPT
Systems
Oxford
Instruments
Plasma
Technology
System
Manual
PLASMALAB
OR
IONFAB
SYSTEM
1 1
1 1
- - - - - - - - - - - - - - - - - - - - -
__
I
,----------------------
1 1
1 1
1
ISOLATION
VALVES
DEDICATED
HEAT EXCHANGER
OR
CHILLER
(FITTED WITH AN
EXTERNAL BYPASS
HAVING A CAPACITY OF
100% FLOW)
TOTAL WATER FLOW
METER OF APPROPRIATE
RANGE
10-MICRON METAL MESH FILTER
MAXIMUM PRESSURE DROP AT
RATED
FLOW
RATE 0.15
BAR
(2.2 PSI)
Fig 2.1: Recommendedbasic recirculation installation
2.1.1
Mandatory
Specifications
for
recirculated
water
systems
CAUTION
If
clear
(i.e.
transparent)
tubing
is
exposed
to
sunlight,
algal
growth
can
develop,
which
can
restrict
coolant
flow.
It
is
MANDATORY
that
clear
tUbing
is
not
used
in
any
part
of
the
cooling
system.
OIPT
recommends
the
use
of
either
black
or
dark
green
tUbing.
CAUTION
It
is
the
customer's
responsibility
not
to
exceed
a
pressure
of
4.2
bar,
or
other
limit
that
has
been
set
for
the
system.
Exceeding
this
safe
pressure
may
cause
irreparable
damage
to
system
components.
The
water
must
be
kept
warm
enough
to
prevent
condensation
on
chamber surfaces and
outside
system components. This applies
to
those parts
of
the
system inside
the
clean
room
and
those parts in a service area. Condensation can
damage
components
such
as
RF
power
supplies,
ferrofluidic
seals and
automatch
units.
Any
damage
so
caused
cannot
be covered by
the
system
warranty.
Issue
16:
April
05
Services Specifications
Page 6
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22
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