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OIPT Systems Oxford Instruments Plasma Technology System Manual 2. Cooling I Warming water There are two acceptable methods of applying cooling / warming water to an DIPT system: Recirculation: Water is pumped through th…

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System
Manual
Oxford
Instruments Plasma Technology
OIPT Systems
1.
Introduction
This
document
gives
the
specifications
of
the
services
required
for
the
Plasma
lab
and
lonfab
systems. For details
of
cooling
flow
rates and electrical supply ratings,
see
the
relevant system
installation
data
sheets.
Customers
must
ensure
that
the
services
as
specified are available
at
the
time
of
delivery
to
reduce system commissioning
time
and
potential
problems.
Unless
other
arrangements
have
been
made
in
writing
with
Oxford Instruments
Plasma Technology (OIPT),
it
is
a
requirement
that
services
meet
the
following
specifications.
If
they
do
not
meet
these
specifications
then
the
system
warranty
and
process
guarantees
may
be
made
invalid.
If
you
suspect
that
you
may fail
to
meet
ANY
of
these specifications. please contact
Oxford
Instruments Plasma Technology
(OIPT)
immediately
so
that
we
can discuss
the
problem
with
you.
Oxford
Instruments Plasma Technology
(OIPT)
conducts a
programme
of
continual
product
development,
and reserves
the
right
to
change
the
design and/or specification
of
equipment
without
notice. The details
contained
in
this
document
were
correct
at
the
time
of
printing
but
should be
confirmed
immediately
prior
to
delivery.
WARNING
BEFORE
INSTALLING
THE
SERVICES
REQUIRED
FOR
OIPT SYSTEMS,
ENSURE
THAT
ALL
RELEVANT
ASPECTS
OF
HEALTH
AND
SAFETY
ARE
FULLY
UNDERSTOOD.
HEALTH
AND
SAFETY GUIDANCE
AND
INSTRUCTIONS
ARE
GIVEN IN SECTION 1
OF
ALL OUR SYSTEM
USER
MANUALS. THIS DOCUMENT
IS
AVAILABLE IN ENGLISH,
FRENCH, GERMAN
AND
JAPANESE.
Printed: 6-Jan-06, 8:44
Services Specifications
Page 3
of
22
Issue
16:
April
05
OIPT Systems
Oxford
Instruments
Plasma
Technology
System Manual
2. Cooling I
Warming
water
There are
two
acceptable methods
of
applying
cooling
/
warming
water
to
an DIPT system:
Recirculation:
Water
is
pumped
through
the
system
by
a dedicated
*heater
/ chiller
or
heat
exchanger.
After
passing
through
the
system,
the
temperature
of
the
water
is
adjusted
before
recirculating
through
the
system.
*Many
customers have a
water
recirculation
facility
shared
by
several
systems. This shared
facility
seldom provides
water
of
suitable quality, and
so
cannot
usually be used
for
cooling
any
part
of
the
DIPT system
without
the
use
of
a
heat
exchanger dedicated
to
the
DIPT system.
Total
Loss
Cooling:
Municipal
(drinking
quality)
water
is
applied
to
the
system
from
a mains
supply, passed
through
the
system
to
cool
it,
then
fed
to
a
drain
for
disposal.
Water
failing
to
meet
the
recirculation
or
total
loss
cooling
specifications must
not
be
put
into
the
system
without
close consultation
with
DIPT.
In some circumstances,
it
may be
appropriate
to
use a
combination
of
recirculation
cooling
and
total
loss
cooling
in
one
system.
It
is
recommended
that
the
customer
uses
a dedicated heater/chiller
either
for
the
whole
system,
or
at
least
for
the
critical components.
Note
that
chillers,
which
cool only, can give
problems
with
condensation
on
chamber components in some environments. This
is
a
particularly
important
consideration
for
production
systems
of
the
batch-load type. In severe
cases,
they
can produce
sufficient
condensation
to
damage components such
as
RF
power
supplies,
ferrofluidic
seals and
automatch
units.
Any
damage
so
caused
cannot
be covered by
the
system
warranty.
Note
that
if
a heater-chiller
is
used
to
provide
warm
water
(above 30
0
C)
for
heated
parts
of
the
system,
then
items such
as
the
turbo
pump
will
need an
independent
water
supply.
Items such
as
turbomolecular
pumps can be cooled
with
total
loss
cooling
if
they
are
of
stainless steel construction and
if
the
water
is
suitable.
If
the
water
is
not
suitable,
then
a
heat
exchanger may be necessary.
Total
loss
cooling
cannot
be
used
on
any
components
that
have
aluminium
in
direct
contact
with
the
coolant.
See
sub-section
2.1.
Issue
16:
April
05
Services Specifications
Page 4
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System
Manual
Oxford
Instruments
Plasma
Technology
OIPT Systems
2.1
Recirculation
water
WARNING
CHILLERS HAVE COMPONENTS, WHICH BECOME COLD ENOUGH
TO
CAUSE SERIOUS
INJURY. READ
THE
MANUFACTURER'S MANUALS
BEFORE
INSTALLING, OPERATING
OR
MAINTAINING
CHILLERS,
AND
ENSURE THAT ADEQUATE PROTECTIVE CLOTHING
IS
WORN.
Recirculation
water
is
used in systems
where
the
user does
not
wish
to
consume
water
at
a
high
rate,
or
where
it
is
wished
to
supply
water
to
the
system
at
a constant
temperature.
Some systems
contain
aluminium
in
direct
contact
with
coolant. These are
the
lonfab
500
Plus,
the
lonfab
300
Plus,
and
Plasma
lab
systems
fitted
with
tables
or
turbomolecular
pumps
with
plain
aluminium
cooling
channels. Certain
aluminium
chambers are also included.
However,
the
lonfab
300
Plus
does
not
contain
aluminium
in
contact
with
water,
unless
it
is
in
the
turbomolecular
pump.
In these
aluminium-containing
systems,
it
is
MANDATORY
that
the
approved
coolant
is
used
at
all times.
If
the
approved
coolant
and
installation
are
not
used,
the
system
warranty
will
not
cover any
damage
caused by
the
coolant
either
directly
or
indirectly
to
the
system
or
to
anything
else.
It
is
the
customer's responsibility
to
comply
with
the
above requirement.
If
the
customer has
any
doubt
as
to
whether
their
system falls
into
this category,
they
must
contact
OIPT
for
further
advice.
In systems
that
do
not
contain
aluminium
components, severe corrosion can still sometimes
occur:
water
will
collect corrosive chemicals, and
will
be lacking in
the
oxygen
that
protects
stainless steel.
We
strongly
recommend
that
the
approved
coolant
is
used.
If
an
alternative
product
or
water
is
used,
then
it
is
entirely
the
customer's responsibility
to
check
for
any signs
of
corrosion
or
contaminated
water.
If
the
customer's
coolant
has
not
been approved in
writing
by
OIPT,
then
the
system
warranty
will
not
cover any damaged caused by
the
coolant
either
directly
or
indirectly
to
the
system
or
to
anything
else'.
The approved
installation
and
coolant
are shown in sub-section 2.1.1 and in Fig 2.1.
Note
that
the
total
water
flow
meter
and
the
isolation valves are recommended
for
cooling
monitoring
and ease
of
maintenance.
, Customers should note.
for
example,
that
certain types
of
inhibitor
will
damage
the
pumps
of
heater/chiller units, and
that
the
use
of
municipal
(drinking
water)
or
deionized
water
can
introduce
harmful
chemicals
into
the
system.
If
plain
water
is
used, distilled
water
is
by
far
the
safest
option.
Printed: 6-Jan-06, 8:44
Services Specifications
Page 5
of
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Issue
16:
April
05