Oxford-100-Manual.pdf - 第347页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Section 10 - Wafer handling options, load locks and robotics Section 10· Wafer handling options, load locks and robotics 1 1…

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Plasmalab System 100
(Iep
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
9.7
Gas
handling
option
spares
OIPT
Part
No.
Qtv
Description
81-9-51 -
Externally
mounted
gas
pod
for
up
to
six MFC lines +
one
rotameter
or
MFC
control
line
MA81Z16003
1
GAS POD CHAMBER A
or
B
PCB
G/AIRIVLV/506
1 6
WAY
SMC ASSEMBLY SPASBR06
ESZ9102 1 DOOR INTERLOCK MICRO-SW
SPOT
G/AIRIVLV/501 1
SINGLE
SMC ASSEMBLY
SPASBR01
G/GAS/F
IT
1614
1
Y4
RETAINING GASKET
81-9-11 1
Non-toxic
Qas
line
excludinQ mass
flow
controller
G/GAS/FIT/614
10
Y4
RETAINING GASKET
81-9-21 1 Toxic gas
line
with
MFC bypass,
excluding
mass
flow
controller
G/GAS/FIT/614
10
Y4
RETAINING GASKET
Gas
Handling
Section 9 Page
10
of
10
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section
10
-
Wafer
handling
options, load locks
and
robotics
Section
10·
Wafer
handling
options,
load
locks
and
robotics
1
10.1 Loadlock (100-10-05C) 2
10.2
Wafer
handling
option
spares 5
Issue
2;
November 02
Printed: 16-Jan-06,15:55
Section 10 Page 1
of
6
Wafer
Handling
Plasma
lab
System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
10.1
Automatic
load
lock
(100-10-0SC)
(:'if
+
\ \
\
~
\
\ \ \
\,
1 \
\ \
\ ' \
/\
~
\ \
\ , 1
\ \
1\
\,
\ \
\
\ \
\
\1
\
\ \ \
@@@
o
Wafer
Handling
Section 10 Page 2
of
6
Issue
2:
November 02
Printed: 16-Jan-06, 15:55